摘要
离焦量和激光能量的空间分布对激光加工质量有着重要的影响,通过调节扩束镜镜间距来满足不同加工材料对离焦量的不同需求是激光加工中常用的方法。通过使用ZEMAX软件分别在序列模式和非序列模式下对激光加工的光路系统进行建模,其中扩束镜是由双透镜组成的伽利略透射式系统,在仿真环境下测量了扩束镜不同镜间距和倾斜度对应的焦点位置和工作面光斑能量分布情况。结果表明:离焦量与镜间距变化量呈线性关系,离焦量随镜间距变化量的减小而减小;负离焦量随倾斜度的增大而增大。工作面上光斑的峰值功率随着扩束镜镜间距和倾斜度的增大而减小,镜间距改变带来的影响远大于倾斜度的影响。工作面上光斑位置的偏移量与倾斜角呈线性关系。光斑模式始终为基模高斯分布。实验测量了扩束镜不同镜间距下的离焦量和工作面光斑能量分布情况,实验结果与仿真结果较好得吻合。
Defocusing amount and spatial distribution of laser energy have a significant effect on the quality of laser processing. It is a commonly used method in laser processing, and the method can adjust the lens distance between beam expanders to meet the different needs of defocusing amounts for the different laser processing materials. We use ZEMAX to model the optical system of laser processing with sequential and non-sequential modes. The beam expander is a Galileo transmission system composed of two lenses. In the simulation environment, the focal position and the spot energy distribution on the working plane are measured at different lens distances and tilt angles. The results show that the defocusing amount is proportional to the variation of lens distance, and the defocusing amount decreases with the decreasing distance. The negative defocusing amount increases with the increasing tilt angle. On the working plane, the peak power of laser spot decreases as the distance between the focal points of two lenses and the tilt angle increase. The effect of lens distance on the laser focusing characteristics is much greater than that of the tilt angle. The displacement of the laser spot is proportional to the tilt angle. The laser spot mode is always base-mode Gauss distribution. Finally, the defocusing amount and the spot energy distribution at different lens distances are measured. The experimental results are in good agreement with the simulation results.
作者
杨亮亮
张珞
朱海红
殷杰
柯林达
曾晓雁
Yang Liangliang;Zhang Luo;Zhu HaihongI;Yin JieI;Ke Linda;Zeng Xiaoyan(Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, Hubei 430074, China;Shanghai Spaceflight Precision Machinery Institute, Shanghai 201600, China)
出处
《激光与光电子学进展》
CSCD
北大核心
2018年第4期248-256,共9页
Laser & Optoelectronics Progress
基金
国家重大安全基础研究(6132801)
国家自然科学基金(61475056
61575074)
关键词
激光技术
激光扩束系统
ZEMAX
聚焦特性
激光加工
镜间距
laser technique
laser beam expander
ZEMAX
focusing characteristics
laser processing
lens distance
作者简介
杨亮亮（1992-），男，硕士研究生，主要从事激光加工系统中光学设计方面的研究。E-mail：llyang@hust．edu．cn;导师简介：朱海红（1968-），女，博士，教授，主要从事激光加工、激光增材制造工艺及装备方面的研究。E—mail：zhuhh@mail．hust．edu．cn（通信联系人）
