摘要
菲佐激光干涉仪使用的标准球面镜头通常只能在特定波长下使用。提出了一种通过调整镜头内部透镜间隔来改变其工作波长的方法,利用该方法设计了两款可变波长标准球面镜头,口径为19.05mm,镜头光圈系数分别为5.6和8。镜头在各目标波长下的参考波前质量均满足设计要求,并分析了公差容限以确保镜头具有可实际加工性。根据可变波长标准镜头的装调和工作原理设计了机械结构,并研制出光圈系数为8的实验镜头,测得其透射波前峰谷值在标准632.8nm激光干涉仪下小于λ/10(λ为入射光的波长),镜头的实际加工误差在容限范围内。使用多波长激光干涉装置和实验镜头测量了同一球面元件的面形,在5种波长下测量结果基本一致,实验结果表明,可变波长标准镜头可以用于实际检测。该类镜头的研发节约了检测成本,提高了标准镜头在激光干涉测量中的利用率,该镜头具有较高的工程应用价值。
The standard spherical lens mounted in the Fizeau laser interferometer can usually be used only at a specific wavelength.This paper presents a method to change the working length of the standard spherical lens by adjusting the lens interval inside it,and two types of wavelength-variable standard spherical lenses are designed by using this method,in which the caliber is 19.05 mm and the aperture coefficients are 5.6 and 8,respectively.The reference wavefront quality of the standard spherical lens at each target wavelength meets the design requirements.The tolerance is analyzed to ensure that the standard spherical lens possesses practical machinability.The mechanical structure is designed according to the assembly and working principle of the wavelength-variable standard spherical lens and an experimental standard spherical lens with aperture coefficient of 8 is developed.The peakvalley(PV)value of the transmitted wavefront under a standard 632.8 nm laser interferometer is less thanλ/10(λ,incident wavelength)and the actual processing error of the lens is within the tolerance range.The multi-wavelength laser interference device and the experimental standard spherical lens are used to measure the surface shape of the same spherical element.The measurement results under five wavelengths are basically the same.The experimental results show that the wavelength-variable standard spherical lens can be used for actual detection.The research and development of this kind of wavelength-variable standard spherical lens can save inspection costs,improve the utilization rate of standard lenses in laser interferometry,and it has high engineering application value.
作者
王艳
张齐元
王全召
陈秋白
王芳
许帅
韩森
Wang Yan;Zhang Qiyuan;Wang Quanzhao;Chen Qiubai;Wang Fang;Xu Shuai;Han Sen(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Suzhou H&L Instruments LLC.,Suzhou,Jiangsu 215123,China;Suzhou W&N Instruments LLC.,Suzhou,Jiangsu 215123,China;School of Mathematics and Physics,Suzhou University of Science and Technology,Suzhou,Jiangsu 215009,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2021年第8期287-295,共9页
Laser & Optoelectronics Progress
基金
国家重点研发计划(2016YFF0101903)。
关键词
成像系统
光学设计
标准球面镜头
可变波长
菲佐干涉仪
面形测量
imaging systems
optical design
standard spherical lens
variable wavelength
Fizeau interferometer
surface profile measurement
作者简介
韩森,E-mail:senhanemail@126.com。
