摘要
设计了一种新型的单基三电极石英晶体谐振器,并在大气环境条件下测试分析了这种谐振器的频率-温度特性,验证了其频率-温度特性与已有的单基单电极谐振器的频率-温度特性基本一致,曲线为三次曲线。在相同激励及环境条件下,在同一基片上设置多对电极时,各对电极构成的谐振器的频率-温度特性基本相同。根据这种相似特点,将同一基片上不同电极对应的谐振器的振动频率进行差频补偿,可有效地抑制温度对谐振器振动频率的影响。这种谐振器所采用的差频补偿方法可为石英谐振器相关特性的进一步开发利用提供依据。研究了这种结构的石英晶体谐振器的晶片表面处理(是否抛光)及边沿形状(是否倒边)对其频率-温度特性的影响。实验结果表明,对单基多电极石英晶体谐振器的晶片表面进行抛光并对边沿进行倒边处理后,谐振器的稳定性得到了有效的改善,性能得到了优化。
A new type of single-base three-electrode quartz crystal resonator was designed and the frequency-temperature characteristic of it in air environment was analyzed. The result shows that the curve of its frequency-temperature characteristic is cubic, which is basically consistent with that of the single-base singular electrode resonator. In the same circumstance and stimulation, the temperature-characteristic curves of resonators made up of each pair of electrodes remain basically the same when the multi-electrode resonators on one single base were designed. Differential frequency compensations on these different electrodes are implemented according to these similarities and effectively restrain the influence which temperature imposes on frequency. This differential frequency compensations mean provides evidence to further development and research on relative characteristics of resonators. The test result proves that the frequency-temperature characteristic of the resonators gets improved as well as according with the one untreated. It is observed clearly that the performance of the resonators are improved after polished and edge beveled.
出处
《微纳电子技术》
CAS
2007年第7期28-30,共3页
Micronanoelectronic Technology
基金
北京市高校学术创新团队基金资助(51050031)
北京市科技发展基金资助(KM200610772009)
关键词
多电极石英谐振器
频率-温度特性
表面处理
差频补偿
multi-electrode quartz resonator
frequency temperature characteristic
surfacetreatment
differential frequency compensation
作者简介
崔媛媛（1983-），女，山东菏泽人，硕士研究生，研究方向为惯性敏感元器件，E—mail：dreamero@mail．biti．edu．cn；
田文杰（1962-），男，云南昭通人，博士，副教授，硕士生导师，主要从事石英惯性器件研究及教学工作；
鄂然（1982-），男，北京人，硕士研究生，研究方向为惯性敏感元器件。
