摘要
通过对共焦三维形貌检测术的分析 ,根据超分辨理论 ,在共焦系统中加入环形光瞳滤波器 ,以期延长系统的动态检测范围 ,并提高系统的横向分辨率。理论和实验结果表明该方法在适当牺牲轴向分辨率的条件下 ,能有效地延长系统的动态检测范围 。
Based on super-resolution theory, the 3-D confocal surface profilometry and annular pupil filter are combined for analyzing the property of the 3-D profilometry. The results of computer simulation and experiment prove that this method can explore the axial dynamic range and improve transversal resolution of 3-D profilometry at decreasing axial resolution.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2001年第7期853-856,共4页
Acta Optica Sinica
基金
国家自然科学重点基金 (6 96 370 30 )
面上基金(6 97770 0 4)资助课题
关键词
共焦三维形貌检测术
超分辨
环形光瞳滤波器
Computer simulation
Optical filters
Optical resolving power
Surface measurement
Three dimensional
