摘要
提出了一种共光路外差干涉测量模拟磁头磁盘静态间隙的方法,该方法以低频差横向塞曼双频激光器作为光源,采用专门设计的双折射透镜分光和相位测量技术,实现了对光波半波长的3600细分,从而使测量分辨率达到0.1 nm。原理实验结果表明,该系统在无恒温的普通实验室条件下,1 h内稳定测量实验结果漂移小于4 nm;利用压电陶瓷(PZT)微动工作台(步进分辨率1 nm)驱动反射镜(模拟磁头)产生位移,在1μm范围内与该系统测量结果进行比对,得到线性相关系数优于0.9998。
A novel method for measuring the simulated disk/slider stationary spacing is proposed in this paper, based on common-path heterodyne interferometry that utilises a transverse Zeeman laser with low beat frequency and a special designed birefringent lens （as beam splitter）. The phase measurement technology is adopted to divide half wavelength of light by a factor of 3600, hence a resolution of 0. 1 nm can be attained. The experimental results show that in ordinary laboratory condition, without air conditioning, the shift of phase measurement about the stability of system is approximately 4° in a hour, and calibration with a commercial PZT micro-drive working table （step resolution： 1 nm; extent： 1 μm） which drives a mirror （simulative slider）, gives the linearly correlation coefficient of 0. 9998.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2005年第12期1664-1667,共4页
Chinese Journal of Lasers
基金
国家973计划(2003CB716205)资助项目
关键词
测量
外差干涉
共光路
相位测量
磁头磁盘
静态间隙
measurement
heterodyne interferometry
common-path
phase measurement
slider/disk
stationary spacing
作者简介
岳兆阳（1983-），男，内蒙古自治区包头市人，清华大学精密仪器与机械学系硕士研究生，主要从事摩擦学测量问题的研究。E-mail：yuezhaoyang00@mails．tsinghua．edu．cn
