摘要
采用泰曼-格林干涉原理设计研制了一种非接触在线球面干涉仪,该干涉仪中的CCD摄像头可产生分辨率比较高的干涉条纹图像。重点介绍了用MATLAB图像处理软件对该干涉条纹图像进行数字化处理的基本方法,通过对干涉条纹图像进行预处理、提取骨架,最后用Zernike多项式拟合出被检球面的波面函数,计算出PV和RMS。通过MATLAB编程实现了对该球面干涉仪检测信号的自动化处理。
A kind of non-contact online spherical interferometer has been designed and developed with Twyman-Green interferometry principle in the laboratory. The CCD camera lens in this interferometer can produce relatively high resolution image of the interence fringe. This paper mainly focuses on the basic method for using MATI.AB image processing software to digitize the interference fringe, and through the pretreatment of this interference fringe and the extraction of the skeleton, finally the wavefont function of the detected spherical surface was fitted by adopting the Zernike polynomial; through the MATLAB programming, the automated processing of the detection signal of this spherical interferometer was realised.
出处
《光学仪器》
2013年第1期65-69,74,共6页
Optical Instruments
基金
福建省科技计划重点资助项目(2009H0020)
作者简介
兰明强（1986-），男，湖北十堰人，硕士研究生，主要从事光电信息处理方面的研究。
