摘要
为减小非线性误差对单频激光干涉仪测量精度及稳定性的影响，分析了引起其非线性误差的各种因素。利用琼斯矩阵推导出该系统光学参量的数学表达式。采用常规的优化调校方法提高系统精度会带来其它参数性能降低。提出改善单频激光干涉仪性能的最优控制优化调校方法。实验结果表明，采用该调校方法，使单频激光干涉仪信号的正交性、干涉条纹对比度和灵敏度均得到了一定程度的优化，干涉条纹对比度vimax,o可达到0．97，并且两路信号对1／8波片转角的4倍周期也变为2倍周期。
To decrease the influence of the nonlinearity error on accuracy and stability of single-frequency laser interferometer, the factors are researched. Based on the Jones matrix, the optical parameters of the system are expressed. The optimal control adjustment to improve single-frequency laser interferometer is described. Experimental results show that the ordinary adjustment is limited to improve the system accuracy. But the orthogonality of signals, interference fringe contrast and system sensitivity are improved by optimal control adjustment. The interference fringe contrast vi achieve to 0. 97, and the four periods of two signals turn into two periods which 1/8 wave plate is revolved.
出处
《计量学报》
CSCD
北大核心
2013年第2期122-127,共6页
Acta Metrologica Sinica
基金
国家863高技术研究发展计划资助项目（2007AA701203）
关键词
计量学
单频激光干涉仪
非线性误差
最优控制优化调校
干涉条纹对比度
灵敏度
Metrology
Single frequency laser interferometer
Nonlinearity error
Optimal control adjustment
Interference fringe contrast
System sensitivity
作者简介
黄雷（1982-），男，吉林长春人，长春理工大学在读博士生，吉林省计量科学研究院工程师，主要从事激光干涉仪及相关领域的研究工作。huanglei_mail@yahoo．com．cn
