摘要
提出一种偏振激光干涉仪的误差校正方法,可实时地对干涉信号的非线性误差进行校正。由于单频激光干涉仪中的光电元件存在的参数误差和位置误差以及外界环境因素的影响,使得输出的4路干涉信号的正交性受到破坏,产生了非线性误差。基于椭圆匹配原理,给出了非线性误差的校正算法和判据。对干涉信号的参数特征进行实时地统计与估值,并借助于对干涉条纹实现16384点细分,从而得到皮米级的位移测量分辨力。搭建了零差偏振激光干涉仪及振动实验装置,对校正前后的信号进行了对比实验。结果表明,经过非线性校正干涉仪信噪比提高超过30dB,测量的分辨力优于10pm/Hz1/2。
A nonlinearity correction method for a homodyne polarized laser interferometer is proposed,which can compensate nonlinearity error for the interferometer in real-time. Because of the parameter errors,adjusting errors of optical components environment disturbing effect,the output signals′ orthogonal characteristic is destroyed,which causes the nonlinearity error. Based on the ellipse fitting principle,nonlinearity error correction method is proposed. It doses a real-time estimation of the interference signal′s parameter characteristics and studies phase correction range that affects the correction error,then fractionizes signal by 16384 subdivisions,then a result with picometer resolution is realized. A correction criterion for real-time nonlinearity correction is proposed. A homodyne polarized laser interferometer and vibration measurement facility are established. The experimental results indicate that the signal-noise ratio of the interferometer with the nonlinear correction is 30 dB more than the one and measurement resolution is superior to 10 pm/Hz1/2.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2010年第9期2585-2589,共5页
Acta Optica Sinica
基金
国家自然科学基金(60807032
60877046)资助课题
关键词
光学测量
误差校正
椭圆匹配
偏振干涉仪
非线性误差
optical measurement
error correction
elliptical fitting
polarized interferometer
nonlinearity error
作者简介
刘彬彬（1982--），男，博士研究生，主要从事高精度激光干涉测量方面的研究。E—mail：liubin1982@126．com
通信联系人。E-mail：yangjun141@263．net
导师简介：苑立波（1962～），男，博士，教授，主要从事自光干涉、光纤智能结构及光学极限测量等方面的研究。E-mail：lbyuan@vip．sina．com
