摘要
Three thicknesses of TiO2 films, 174, 195, and 229 nm, were deposited onto quartz substrates by sol–gel spin coating method. The as-deposited thin films were characterized by nano-crystallite with different sizes (19–46 nm) and relatively high porous structure. Optical constants were determined and showed the lowest refractive index of 1.66 for the as-prepared films that ever reported till now. Obtained results were discussed through current theoretical ideas.
采用溶胶凝胶旋转涂布技术在石英基质上沉积三种不同厚度的TiO2薄膜,其厚度分别为174、195和229nm。沉积得到的薄膜是由尺寸为19~46nm的纳米微晶组成的,并具有较高的多孔结构。测定了薄膜的光学常数,得到了迄今为止报道的最低折射率1.66,并对所得结果进行了讨论。
