摘要
本文对微机械中热胀系数不同的材料构成的双层复合薄板在均匀温升下的挠曲特性进行了研究 ,提出了在均匀温升下双层薄板热挠曲求解的能量法 ,并给出了小挠度下中心挠度与板厚的解析关系 ,为薄膜谐振式传感器温度特性的研究和新型温度传感器的设计与开发打下了基础 .
We research on the thermal buckling characteristics of double layer membrane which is composed of different materials with different thermal expansion coefficiens under uniform temperature elevation.The energy method is proposed which is used to solve the problem and the symbolic relation between central buckling height and substrate height under small buckling height is also given.It is the primary theory of membrane resonant sensor,which makes the research and development of novel thermal sensor possible.
出处
《电子学报》
EI
CAS
CSCD
北大核心
2000年第2期59-61,共3页
Acta Electronica Sinica
基金
国家自然科学基金
博士点基金
关键词
薄膜微机械
谐振式传感器
双层薄板热挠曲
membrane micro machine
resonance sensor
double layer membrance
thermal buckling
uniform temperature elevation
