摘要
为了实现微悬臂梁传感器的自驱动自感知功能,设计了嵌套式阶梯结构微悬臂梁传感器。采用有限元分析的方法对其微梁的自由端弯曲位移和固有频率进行了仿真,研究了阶梯结构对微悬臂梁传感器性能的改善,确定了微悬臂梁传感器的阶梯结构参数。结果表明,经优化设计后的微梁传感器,微悬臂梁自由端弯曲位移可达566 nm,提高了2倍;固有频率可达385 k Hz,提高了1. 45倍。阶梯式微梁的成功设计为传感器的集成与小型化奠定了基础。
In order to make the micro-cantilever sensor realize the function of self-drive and self-sensing,a nested ladder micro-cantilever sensor was designed.The free end bending displacement and natural frequency of the micro-beam were simulated by finite element analysis.The improvement of the performance of the micro-cantilever sensor by stepped structure was studied,and the ladder structural parameters of the micro-cantilever sensor were determined.The results show that the bending moment of free end of micro-cantilever can reach 566 nm,which is increased by 2 times.The natural frequency can reach 385 kHz,which is 1.45 times higher.The successful design of the stepped micro-beam lays the foundation for the integration and miniaturization of the sensor.
作者
夏贝贝
揣荣岩
张贺
XIA Bei-bei;CHUAI Rong-yan;ZHANG He(College of Information Science and Engineering,Shenyang University of Technology,Shenyang 110870,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2018年第12期5-8,共4页
Instrument Technique and Sensor
关键词
微悬臂梁
阶梯结构
多晶硅
压电驱动
弯曲位移
固有频率
micro-cantilever
stepped structure
polysilicon
piezoelectric actuator
bending displacement
natural frequency
作者简介
夏贝贝(1992-),硕士研究生,研究方向为传感器与接口电路。E-mail:18004029684@163.com;揣荣岩(1963-),教授,博士生导师,主要从事半导体物理MEMS技术等领域的研究。E-mail:me-sut@163.com;张贺(1981-),博士后,研究方向为MEMS传感器等领域的研究。E-mail:zhanghe@sut.edu.cn
