摘要
本文介绍了利用新型微位移驱动器、位移传感器、X—Y弹性工作台等组成的定心系统。该系统利用传感器测得的信号,通过模型处理可同时获得x、y两方向的偏移分量进行偏心调整。准确度分析和实验表明:在200×200μm的调整范围内,该系统驱动分辨力优于0.022μm,定心准确度优于0.05μm,定心稳定性优于0.
This paper introduces a revolving workpeice centering system which consists of new type,picomoters (Motorized Components),sensor(LVDT) and X-Y Positioning stages and so on.With the application of sensors and mathematical model,the system can calculate adjusting magnitude along the x coordinate axis and y coordinate axis and carry out adjustment respectively.Error analysis and actual verification show that measurement accuracy is superior to 0.05μm,measurement resolution is superior to 0.022μm and measurement stability is superior to 0.015μm/10min in the range of 200×200μm.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1999年第5期534-536,共3页
Chinese Journal of Scientific Instrument
关键词
自动定心
弹性工作台
位移驱动器
回转体
Automatic centering system\ X-Y Positioning stages\ New type picomoter
