摘要
介绍精密超精密定位技术的基本概念，目前国内外所能达到的定位精度水平和定位系统的构成，并对实现越精密定位的关键技术进行分析和讨论，最后介绍笔者在这一领域的研究工作。
The basic concepts of precision and ultraprecision positioning, the present level of positioning precision at home and abroad, and architecture of positioning system are presented in this paper. The key technology to realize ultraprecision positioning is analysed and discussed. An author's practical research in this field are introduced as well.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
1997年第4期73-75,共3页
China Mechanical Engineering
