摘要
随着微米／纳米科学技术的发展，微细加工微区分析所用的主要技术之一──聚焦离子束技术引人注目．本文简述了具有液态金属离子源的聚焦离子束技术的主要功能，着重报道了近年来该技术在下述领域中的应用：（1）半导体大规模集成电路器件的集成、失误诊断和修复．（2）光电子集成技术中量子阱激光器和光纤相位掩模的制备及量子效应研究．（3）超导器件和真空微电子器件的研制．（4）二次离子质谱分析和透射电子显微镜样品的制备．
Following the development of micro/nano science and technology,one of the most important technologies in microfabrication and microanalyses, focused ion beam (FIB) technology, is gaining more interests. In this paper, the main functions of FIB technology with liquid metal ion ires (LMIS) is summarized briefly. Its recent applications in the following regions are reviewed in detail: (1) In integrated semiconductor circuits: integrating devices, failure analysis and repair. (2)In integrated optoelectronic circuits: the fabrication of quantum well laser and phase mask for optical fiber, the research of quantum effeCts. (3)the fabrications of superconductor devices and vacuum microelectronic devices. (4)the technology of secondary ion mass spectrometry and the preparation of specimens for transmission electron microscopy.
出处
《电子学报》
EI
CAS
CSCD
北大核心
1999年第6期110-114,共5页
Acta Electronica Sinica
基金
国家"863"项目
关键词
聚焦离子束
液态金属离子源
IC
微米/纳米技术
Focused ion beam, Liquid metal ion source, Microfabrication, Semicondutor integrated circuit, Photonic and optoelectronic integrated circuit, Micro/nano technology
