摘要
利用磁控共溅射法在液氮冷却的衬底(LNCs)上制备了Al-Pb合金薄膜,运用EDX、XRD、TEM和SEM对薄膜成分、结构及形貌进行了研究。结果表明,Al-Pb薄膜在Pb含量为7.38%～2.73%(原子分数,下同)的宽范围内,均存在Al在Pb中的fccPb(Al)亚稳过饱和置换固溶体,固溶度与膜成分相关,随薄膜Pb含量的变化,固溶度在3.03%～5.31%Al之间变化,Al-48.9%Pb膜扩展固溶度最大(5.31%Al),薄膜Pb含量降低或升高时,fccPb(Al)固溶体的固溶度下降。此结果与Miedema理论计算的Al-Pb系混合焓随Pb含量的变化趋势相似。低温衬底下Pb的体扩散弱化并导致相分离倾向降低是固溶延展的动力学原因。
The component, structure and surface morphology of Al-Pb alloy thin films fabricated by magnetron co-sputtering technique on liquid-nitrogen-cooled substrates are investigated by EDX, XRD, TEM and SEM. The resuits show that the presence of fcc Pb（Al） metastable supersaturated substitutional Al in fcc-Pb lattice solid solution in AI-Pb thin films with Pb of 7. 38at%0-92. 73at%. The value of solubility vary from 3.03at% to 5. 31at% with the Pb concentration changes in AI-Pb thin films. The maximum fce Pb（Al） solubility is about 5.31at% for A1-48. 9at% Pb thin films, and lower or higher Pb content will decrease the solubility. This results are similar to the variation trend of Al-Pb mixture enthalpy with Pb content calculated by Miedema theory. It is considered that the extended solubility can be attributed to a kinetic cause, i. e. , the Pb bulk diffusion is weaken and hence the tendency of phase separation decreases under cooled substrates condition.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2010年第10期10-13,共4页
Materials Reports
基金
云南省自然科学基金重点资助项目(2004E0004Z)
云南省自然科学基金资助项目(2006E0018Q)
关键词
Al—Pb合金薄膜
亚稳固溶体
扩展固溶度
磁控共溅射
Al-Pb alloy thin films, metastable solid solution, extended solubility, magnetron co-sputtering
作者简介
郭中正：男，1983年生，博士生，主要研究方向为金属薄膜材料的结构与性能Tel：0871-5136698E-mail：1982gzz@163．com
孙勇：通讯作者，教授，博导Tel：0871-5334093E-mail：xbysun@sina．com
