摘要
阐述了准分子激光加工及其特点，并着重介绍了准分子激光在微细加工和微电子制造业中的应用，以及对于不同材料的应用情况。
Excimer laser processing and its characteristics are introduced in this paper. The main contents are the applications of excimer laser processing in micromachining, microelectronic industry and the processing of different kinds of materials.
出处
《航空工艺技术》
1998年第4期32-33,43,共3页
Aeronautical Manufacturing Technology
