摘要
以微机械为应用背景,采用准分子激光加工方法对Al2O3陶瓷材料表面进行加工,考察加工表面的形貌特征。研究表明,准分子激光加工表面形貌的统计参数具有显著的规律性。其高度参数的算术平均值Ra和均方根值Rq随工艺参数呈现同步同趋势变化的规律,并且相互之间具有定量的关系。对此本文提出了准分子激光加工表面轮廓的简化模型,分析计算的结果与实测数据基本吻合。研究还表明,准分子激光加工表面相当平坦,其坡度均方根值.Zq随工艺参数的变化不大。上述特征是由准分子激光加工原理决定的,与通常的切削加工截然不同。
Based on the application of the microelectromechanical systems （MEMS）, the surface of Al2O3 ceramic is processed by excimer laser and the characteristics of topography are examined. It is demonstrated that the statistic parameters of surface topography processed by excimer laser have obvious regularity. The arithmetic-mean value Ra and the root-mean square value Rq change with the processing parameter in the same step and trend, and there are quantitative relation between them. This paper proposes a simplified model for the excimer laser processing surface profile whose results of the analyses and calculation agree basically with experimentalflat.ticsdata. Furthermore, the studies show that the surfaces processed by excimer laser are considerably Skewness root-mean-square value Z^.q changed little with technological parameter. The above characterisdepend on the processing principle of excimer laser, quite different from cutting processing
出处
《机械科学与技术》
CSCD
北大核心
2005年第8期929-931,973,共4页
Mechanical Science and Technology for Aerospace Engineering
基金
国家自然科学基金项目(50275071)
国家自然科学基金重点项目(50135040)
江西省自然科学基金项目(0250018)资助
关键词
准分子激光加工
表面形貌
形貌参数特征
Excimer laser processing
Surface topography
Characteristics of topography parameters
作者简介
刘莹（1957-），女（汉），江西，教授，博士生导师
