摘要
研究了铁电薄膜红外探测器响应率等器件参数随铁电薄膜厚度的变化.器件的隔热层结构采用气凝胶二氧化硅.实验发现器件的热释电系数,吸收率以及热导均随膜厚增加而增加.铁电膜层厚度为240nm的器件,其热导与微桥结构器件的热导相近,都为10-7W/K量级,证明气凝胶二氧化硅做隔热层能够制备出性能优良的热释电红外探测器.随着薄膜厚度增加,热导急剧增大,这是引起器件响应率降低的原因.制备铁电薄膜过程中的多次650°高温退火可能降低了二氧化硅多孔率.
The variation of voltage responsivity of infrared detectors and other parameters of the devices with the thicknesses of the ferroelectric film was studied. The thermal insulation layer of the detector was sol-gel derived porous silica. The absorption, pyroelectric coefficient and thermal conductance of the devices were found to increase with the increase of the ferroelectric film thicknesses. The thermal conductance of the devices with 240nm ferroelectric film was about the same order as those devices with microbridge structure, e.g. 10^-7W/K. This result demonstrates that high quality of infrared detector can be made with an aerogel silica thermal insulating layer. The degradation of the voltage responsivity with the increase of film thickness is due to the rapid increase of the thermal conductance. The repeated high temperature annealing processes at 650℃ during the preparation of the fertoelectric film may cause a decrease in the porosity of the silica.
出处
《红外与毫米波学报》
SCIE
EI
CAS
CSCD
北大核心
2007年第5期329-331,335,共4页
Journal of Infrared and Millimeter Waves
基金
国家自然科学基金资助项目(60371040)
上海市科委基础研究重点项目(03JC14076)
作者简介
林铁（1978-），男，福建连江人，博士，从事铁电材料和红外器件方面的研究．
