摘要
在调研世界和我国等离子体刻蚀技术的发展现状的基础上,分析我国急需培养的等离子体材料处理方面的几类不同人才;然后对培养不同人才所需要的教材提出不同的理想指标;最后根据这个理想框架,重点对市面上销售的主要中文、英文相关书籍进行分析比较,列出其主要内容和适合阅读对象,希望读者能够方便地选择出适合自己的教材。调研结果表明,中文相关书籍基本上都不适合作为教材使用,而英文相关书籍是我们值得学习借鉴的。
This thesis describes the current status of plasma etching technology in the world and in China., and then suggests that the best and the only way to solve the problems in China is to train many people with different kinds of technical background and who understand plasma discharges and materials processing. These kinds of people are much in demand in today＇s China. Then, aiming at different requirement for different kinds of technical people, the thesis puts forward different requirement for textbooks. Based on these different requirements, this thesis compares leading Chinese and English books in the market, and then presents their main contents as well as the suitable potential readers. We hope that this thesis can help the potential readers to know more about these books and to help them to make wise decisions while selecting the most appropriate books for them to read. The result indicates that most books in Chinese are not suit to be textbooks, while lots of English books are worthy for us to learn hard.
出处
《电子工业专用设备》
2006年第8期4-9,共6页
Equipment for Electronic Products Manufacturing
关键词
集成电路
等离子体刻蚀技术
人才
教材
Integrate circuit
Plasma etching technology
Talents
Textbook
作者简介
黄梦琦（1984-），女，湖北省黄石市人，清华大学工程物理系本科毕业，从事等离子体物理的研究。
