摘要
设计了一种可用于射频(RF)通信系统中的MEM平行板可变电容,采用新颖的双间隔(two-gap)结构、金属铝极板、折叠“Y”形支撑和厚度不均的可动极板。用CoventorWare软件模拟了电容的C-V特性,当控制电压从0变化到10V时,RF信号电容相应从0.37pF增加到5.64pF,变容比约为15.24∶1;用HFSS软件模拟了电容的S11参数,电容的品质因数Q在1.8GHz下约为77.78。
A MEM variable capacitor for RF communications systems was presented. The capacitor was designed using a novel two-gap structure, using aluminum as the capacitor electrode material, using “Y” shape beams as the suspend electrode spring, and using a asymmetry thickness plate as the suspend electrode. The C-V characteristic was simulated by CoventorWare software. The capacitance of the signal capacitor is variable from 0.37 pF to 5.64 pF as the control voltage is swept from 0 to 10V, and the capacitance ratio is 15.24 ： 1. The Stt parameter of the capacitor is obtained by HFSS software, and the Q factor is 77.78 at 1.8 GHz.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2006年第1期41-44,共4页
Electronic Components And Materials
关键词
电子技术
射频
MEM可变电容
变容比
品质因数
electronic technology
RF
MEM variable capacitor
capacitance ratio
quality factor
作者简介
董乔华（1981-），男，江苏大丰人，研究生．主要从事RFMEMS的研究。Tel：（025）83792632—8826：E—mail：dongqhor@hotmail．com。
通讯作者：廖小平（1966-）。男，湖南衡阳人，教授。博士，主要从事RFMEMS的研究。Tel：（025）83792632—8807；E—mail：xpliao@seu.edu．cn；
