摘要
用CCD摄像传感器摄取激光干涉图纹,采用Visual C++编程,对干涉图像用反高斯变换的光强平均分布的快速处理,保证干涉图纹信息的完整性;同时运用数字图像处理学中的 LOG算子对干涉图像进行边缘检测,用数学形态学中的零交叉细化处理方法对干涉条纹进行细化处理,从而测量出引起条纹相位变化的微位移,其精度可达1/100的条纹间隔。可实现光学亚μm和nm尺度的测量。
Using the intensity hypodispersion of the anti-Gauss distribution and visual C++ program, a series of interference fringes image shot with CCD fast processing method were obtained. To assure the information integrality of the interference fringes, the edge detection instead of binary method with the LOG operator in digital image processing and the effective thinning method of laser interference fringes with zero crossing in the morphology were used. Using the phase of laser interference thining fringes, the micro displacement was measured. The experiment indicates that the program is available. The measurement accuracy can achieve one hundredths fringes interval. This method can realize optical measurement in the scale of submicron and millimicron.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2005年第3期336-339,共4页
Journal of Optoelectronics·Laser
基金
江西省自然科学基金资助项目(0312003)
江苏省光电技术重点实验室开放基金资助项目(KJS01040)
