摘要
研制了一种大扫描范围原子力显微镜(AFM)。设计了新的扫描驱动电路,使单幅图像的扫描范围大幅度提高;用步进电机和扫描器配合扫描,得到序列图像,序列图像拼接后获得大范围样品图像。实验结果表明,采用这一方法,在±150V 的电压驱动下,AFM 的扫描范围可增大到10 ìm?1 mm 的量级,同时保持 1 nm 量级的测试分辨力。
An atomic force microscope (AFM) with large scanning range is developed. The scanning and driving circuits are designed and this makes its scanning range for single image being improved in large scale. The scanning for samples is carried out by the scanner together with step motor, thus a series of sample images can be obtained. Sample image with large size can be obtained after the sequential images being spliced. The experimental results show that with this method the scanning range of AFM can be expanded from 10 micrometers to 1 millimeter under +/-150 V driving voltage and at the same time 1 nanometer level testing resolution can be maintained.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2004年第6期30-33,共4页
Opto-Electronic Engineering
基金
国家教育部博士点基金资助项目(2000033516)
关键词
原子力显微镜
控制系统
大范围扫描
拼接图像
Atomic force microscope
Control systems
Large scan range
Spliced image
