摘要
研制一种新型数字硅MEMS地震检波器,集成三支硅MEMS陀螺与加速度计,可提供三维加速度、速度、角速度及位移等振动信息,可提高检波器的信息量及效率;提出的基于无需指北单轴速率转台的硅MEMS地震检波器六位置正反速率标定方法,不仅可提高标定精度与效率,且可减小标定工作量。并经实验验证该数字硅MEMS地震检波器样机及标定补偿方法的可行性与适用性。
A new-type seismic geophone, integrating three MEMS aeeelerometers and gyroscopes, was developed. It can provide informations of linear acceleration, linear velocity, angular velocity and vibration displacement with greatly improved performance and efficiency. A new six-position plus rotation calibration scheme for the digital geophone was proposed which utilizes only a single axis turn-table without north reference. The experimental results show that the proposed method improves the measurement precision, and verifies the validity of the silicon MEMS geophone.
出处
《振动与冲击》
EI
CSCD
北大核心
2013年第9期84-89,共6页
Journal of Vibration and Shock
基金
中央高校基本科研业务费专向资金创新团队资助计划项目(ZY20120103)
中国地震局教师科研基金(20120104)
