摘要
本文通过扫描电镜(SEM)观察、拉曼光谱(Raman)分析研究了O_2-C_2H_2系燃焰法沉积金刚石薄膜的整体生长特征及气体配比与基底在火焰中所处位置对金刚石生长习性、沉积速率及合成质量的影响。
This paper has made an intensive investigation on the overall mophology of diamondfilms deposited by the accetylene-oxygen combustion synthesis and effects of the major pro-cessing parameters on films quality and deposition rate, using the scanning election mi-croscopy (SEM) and Raman spectroscopy.
出处
《粉末冶金材料科学与工程》
EI
1997年第3期209-215,共7页
Materials Science and Engineering of Powder Metallurgy
