摘要
辉光放电光谱分析仪器可直接分析固体样品,并可对样品表面进行沿深度方向的逐层分析,可用于材料表面成分分析、产品质量检验等研究领域。文中研究了一种小型辉光放电光谱系统,研制了辉光放电激发源,并采用射频电源驱动。采用AvaSpec-ULS2048型便携式CCD全光谱检测器,代替传统的多道分光检测系统,简化了仪器结构并减小了体积,更适合应用于小型的实验室和学校研究室等一些场合。通过实验确定了此系统分析铜基、铁基块状样品的最优工作参数,为射频功率50 W、氩气压强270 Pa。采用本系统对铜基、铁基块状样品进行了分析精密度实验,Cu基样品中的P、S、Al、Si元素测试结果的相对标准偏差值(RSD)均≤2.13%,Fe基样品中的Cu、C、Al、Si元素测试结果的相对标准偏差值(RSD)均≤2.08%。采用该系统对20.86μm镀锌层样品进行了深度剖面分析,给出了Zn、Fe、C、P、Al、Si元素的光谱强度分析曲线。
Glow discharge optical emission spectrometer(GD-OES)can be used to analyze solid samples directly and to perform surface analysis layer-by-layer.It is widely used in composition analysis of material surface and product quality inspection.We researched a compact glow discharge spectroscopy system,and developed a new glow discharge excitation source which is driven by radio frequency(RF)power.The multi-channel spectroscopic detection system of traditional GDOES was replaced by an AvaSpec-ULS2048 portable CCD full-spectrum detector in our research.By using this CCD detector,the instrument structure of GD-OES was simplified and its size was miniaturized.This new system is more suitable for applications in small laboratories or school laboratories.Moreover,the optimal working parameters(RF power 50 W,argon pressure 270 Pa)of copper-based and iron-based block samples were determined by experiments.Copper-based and iron-based bulk were taken as samples to perform the analysis precision tests.The Relative Standard Deviation(RSD)results of P,S,Al and Si elements in Cu-based samples are≤2.13%.The RSD results of Cu,C,Al,and Si elements in Fe-based samples are≤2.08%.The depth profile analysis of 20.86μm galvanized layer is carried out,and analytical curves of spectral intensity of Zn,Fe,C,P,Al and Si elements are given.
作者
万真真
张闯
付新新
乔博仑
王永清
WAN Zhenzhen;ZHANG Chuang;FU Xinxin;QIAO Bolun;WANG Yongqing(College of Electronic Information Engineering,Hebei University,Baoding 071002,China)
出处
《高电压技术》
EI
CAS
CSCD
北大核心
2020年第2期709-714,共6页
High Voltage Engineering
基金
国家自然科学基金(61440006)
河北省自然科学基金(B2014201008)
河北大学研究生教育教学改革研究项目(Yjs2016-33).
关键词
辉光放电光谱
CCD光谱检测
深度分析
射频
光谱强度
glow discharge spectrum
CCD spectral detector
depth profile analysis
radio frequency
spectral intensity
作者简介
通信作者:万真真,1981—,女,博士,副教授,硕导,从事光谱分析仪器和自动化检测仪器研究工作,E-mail:wanzhenzhen@126.com
