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岩石样品扫描电镜图像质量影响因素分析 被引量:4

Analysis of influence factors on image quality of rock samples by SEM
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摘要 扫描电镜(SEM)是实验表征中重要的仪器,前处理对扫描电镜成像影响很大,为阐明前处理方法对扫描电镜图像的影响,系统梳理了SEM岩石样品前处理基本要求,介绍两种岩石样品制备的经验方法,明确乳胶制样镀金后得到的图像质量比导电胶制样镀金后得到的图像质量高的原因。分析探测器、加速电压、工作距离等参数的选取对岩石样品成像质量的影响。结果表明,导电性差的岩石样品适合在低电压下观察(2~5 kV),如需得到高分辨率的图像,需镀金;样品镀金时间为180 s时,样品图像质量高且样品表面特征不易受金颗粒遮挡;岩石样品的最佳工作距离是8 mm左右。研究对岩石样品表面形貌表征有较大意义。 Scanning electron microscopy(SEM)is an important instrument in the experimental characterization,pretreatment had a great influence on scanning electron microscopy imaging,clarify pretreatment method for scanning electron microscopy image,the influence of the system combing the basic demand of SEM rock sample preparation is introduced the experience of the two kinds of rock sample preparation method,has been clear about the emulsion system resulting from the gilded image quality than conductive adhesive sample preparation gold-plated after the cause of the high image quality.The influence of detector,acceleration voltage,working distance and other parameters on the imaging quality of rock samples is analyzed.The results show that rock samples with poor conductivity are suitable for observation under low voltage(2-5 kV).If high-resolution images are needed,gold plating is required.When the gold-plating time of the sample is 180 s,the image quality of the sample is high and the surface features of the sample are not easily shielded by the gold particles.The optimum working distance for rock samples is 8 mm.The study is of great significance to the surface morphology characterization of rock samples.
作者 彭涌 薛华庆 赵永明 兰亚男 潘珑琦 张楚杰 PENG Yong;XUE Huaqing;ZHAO Yongming;LAN Ya'nan;PAN Longqi;ZHANG Chujie(Research Institute of Petroleum Exploration&Development,Langfang 065007,China;Fourth Oil Production Plant,Petro China Huabei Oilfield Company,Langfang 065007,China)
出处 《中国测试》 CAS 北大核心 2020年第S02期156-160,共5页 China Measurement & Test
基金 “十三五”国家科技重大专项(2017ZX05035002)
关键词 扫描电子显微镜 前处理方法 成像质量 实验表征 SEM pretreatment method image quality experimental characterization
作者简介 彭涌(1992-),男,山西朔州市人,工程师,主要从事天然气开发和新能源技术研究。
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