摘要
二维GaN纳米结构的制备对二维GaN基电子、光电子等纳米器件具有重要意义。文章用化学气相沉积(CVD)制备二维GaN纳米片时用了液态金属催化剂,成功制备二维GaN纳米片,得到制备GaN纳米片的最佳工艺条件。通过对制备的GaN纳米片进行扫描电子显微镜(SEM)、能谱仪(EDS)以及X射线衍射仪(XRD)测试表征,结果表明制备的GaN纳米片是表面光滑、大小薄厚均匀、结晶度良好的六方钎锌矿结构GaN纳米片。
The preparation of two-dimensional GaN nanostructures is important for two-dimensional GaNbased electron and optoelectronic nanodevices.In this paper,chemical vapor deposition(CVD)with liquid metal catalyst is used to prepare GaN nanosheets,which is successfully prepared to obtain the best process conditions for preparing GaN nanosheets.Test characterization of the prepared GaN nanosheets is processed using scanning electron microscope(SEM),energy spectrometer(EDS),and X-ray diffraction instrument(XRD).The results show that the prepared GaN nanosheets has smooth surface,uniform size and thickness,and nice crystallinity.
作者
蔡晓平
沈鹏飞
崔真
李恩玲
高春昱
CAI Xiaoping;SHENG Pengfei;CUI Zhen;LI Enling;GAO Chunyu(North West National Center of Metrology,Xi’an 710048,China;School of Science,Xi’an University of Technology,Xi’an 710048,China;Shaanxi Institute of Metrology Science,Xi’an 710100,China)
出处
《中国测试》
CAS
北大核心
2023年第S01期174-177,共4页
China Measurement & Test
基金
国家自然科学基金项目(12104362)
作者简介
蔡晓平(1965-),陕西岐山县人,高级工程师,硕士,研究方向为测试计量技术及仪器。
