摘要
大型仪器设备共享是节约社会资源的重要手段。该文以上海交通大学先进电子材料与器件校级平台为基础,从实验室环境、设备工艺、物资需求、研究方向、人员等方面系统分析和总结了开放式半导体微纳加工平台的特点,并对实验平台开放所面临的挑战进行了探讨,为开放式半导体微纳加工平台的建设和管理提供借鉴和参考。
Sharing of large-scale instruments and equipment is the important means to save social resources.Based on the university level platform for advanced electronic materials and devices of Shanghai Jiaotong University,this paper systematically analyzes and summarizes the characteristics of the open platform for semiconductor micro-nano processing from laboratory environment,equipment and technology,material demand,research direction,personnel,etc.,and at the same time,explores upon the challenges faced by the opening of the experimental platform in order to provide reference for the construction and management of the open platform for semiconductor micro-nano processing.
作者
王英
程秀兰
马玲
付学成
瞿敏妮
沈赟靓
WANG Ying;CHENG Xiulan;MA ling;FU Xuecheng;QU Minni;SHEN Yunliang(Platform for Advanced Electronic Materials and Devices,Shanghai Jiaotong University,Shanghai 200240,China)
出处
《实验技术与管理》
CAS
北大核心
2020年第2期229-232,共4页
Experimental Technology and Management
关键词
微纳加工平台
开放式平台
管理模式
micro-nano processing platform
opening platform
management model
作者简介
王英(1970—),女,吉林长春,博士,副教授,主要从事微纳加工技术与实验室管理工作。E-mail:wangying@sjtu.edu.cn
