摘要
随着空间几何量精密测量技术在装备制造工业的制造与装配过程中应用越来越广泛,角度计量正在从平面角度向空间角度发展。针对磁光阱的异面空间角度进行测量,使用平行平晶作为标准平面引出待测面法向量,并将其空间角度有效的划分成水平投影角和竖直投影角两个平面角度进行测量,保证了空间角度的可溯源性,得到磁光阱各待测面法向量间的空间角度偏差最大值为0.2860 mrad;然后通过蒙特卡洛法评定该方法的测量不确定度为0.0959 mrad;最后与三坐标测量机法比对结果中偏差最大值为0.1842 mrad,在考虑待测面平面度指标为±0.1454 mrad时,二者的一致性良好。目前该方法已在NIM5铯原子喷泉钟物理真空子系统的研制中进行了应用,证明了该方法能够满足测量的准确度要求。
With more and more extensive application of spatial geometric precision measurement technology in the manufacturing and assembly process of equipment manufacturing industry,angle measurement is developing from plane angle to spatial angle.The spatial angle of the different planes of the magneto-optical trap is measured.A parallel flat crystal is utilized as the standard plane to draw the normal vector of the surface to be measured.The spatial angle is effectively divided into two plane angles,which are the horizontal projection angle and the vertical projection angle.The traceability of the spatial angle is guaranteed,and the maximum spatial angle deviation between the normal vectors of the measured surfaces of the magneto-optical trap is 0.2860 mrad.Then,the measurement uncertainty of this method is evaluated as 0.0959 mrad by the Monte Carlo method.Compared with the coordinate measuring machine method,the maximum deviation is 0.1842 mrad.When the flatness index of the surface is set to±0.1454 mrad,the consistency between the two is good.At present,this method has been applied in the development of the physical vacuum subsystem of the NIM5 cesium atomic fountain clock,which proves that the method can meet the accuracy requirements of the measurement.
作者
朱进
黄垚
朱维斌
薛梓
邹伟
Zhu Jin;Huang Yao;Zhu Weibin;Xue Zi;Zou Wei(College of Metrology&Measurement Engineering,China Jiliang University,Hangzhou 310018,China;National Institute of Metrology,China,Beijing 100029,China;State Key Laboratory of Modern Optical Instrumentation,College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2022年第1期103-110,共8页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金(51935004)项目资助
关键词
空间角度
计量学
测量不确定度
蒙特卡洛法
spatial angle
metrology
measurement uncertainty
Monte Carlo method
作者简介
朱进,2019年于东华理工大学长江学院获得学士学位,现为中国计量大学硕士研究生,主要研究方向为角度计量。E-mail:1067940964@qq.com;通信作者:黄垚,中国计量科学研究院高级工程师,主要研究方向为角度计量。E-mail:huangyao@nim.ac.cn
