In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon tech...In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine （NMM）. The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.展开更多
针对测量机接触式测头在动态测量过程中精度低这一问题，分析了测头的动态误差来源，并通过标准球的测量实验验证了影响测头动态测量精度的主要因素，其中逼近速率、测杆长度、测端直径是关键的3个影响因素。为了减小测头引起的动态测...针对测量机接触式测头在动态测量过程中精度低这一问题，分析了测头的动态误差来源，并通过标准球的测量实验验证了影响测头动态测量精度的主要因素，其中逼近速率、测杆长度、测端直径是关键的3个影响因素。为了减小测头引起的动态测量误差，引入了RBF神经网络误差补偿模型，从而避免了传统误差模型中复杂的数学关系的推导。在Global Class 9158测量机上对标准球的测量数据建立了训练样本，并对标准环规的测量数据作为测试样本进行误差补偿。测试结果表明经过误差模型补偿修正后测量误差均值从3．5μm减小到1．3μm，并且模型稳定可靠。展开更多
基金supported by the Nano Special Projects of Shanghai Science and Technology Commission of China(Grant No.11nm0560800)the Young Scientists Fund of the National Natural Science Foundation of China(Grant No.11104284)
文摘In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine （NMM）. The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.
文摘针对测量机接触式测头在动态测量过程中精度低这一问题，分析了测头的动态误差来源，并通过标准球的测量实验验证了影响测头动态测量精度的主要因素，其中逼近速率、测杆长度、测端直径是关键的3个影响因素。为了减小测头引起的动态测量误差，引入了RBF神经网络误差补偿模型，从而避免了传统误差模型中复杂的数学关系的推导。在Global Class 9158测量机上对标准球的测量数据建立了训练样本，并对标准环规的测量数据作为测试样本进行误差补偿。测试结果表明经过误差模型补偿修正后测量误差均值从3．5μm减小到1．3μm，并且模型稳定可靠。
