This article gives a brief introduction to manufacturers and markets of sputtering targets as well as the manufacturing technology thereof. Then, it analyzes the application of high-purity gold sputtering targets in t...This article gives a brief introduction to manufacturers and markets of sputtering targets as well as the manufacturing technology thereof. Then, it analyzes the application of high-purity gold sputtering targets in the fields of integrated circuit, information storage, flat panel display, etc. Based on the above, the article analyzes the processing development trend for the high-purity gold sputtering targets in aspects of ultra-high purity, manufacturing technology, analysis and testing technologies.展开更多
Lithography is one of the most important and complicated key equipment for the integr ated circuit man ufacture.The 2一D positioning device is the importan t subsystem of lithography.Compared with conventional 2一D po...Lithography is one of the most important and complicated key equipment for the integr ated circuit man ufacture.The 2一D positioning device is the importan t subsystem of lithography.Compared with conventional 2一D positioning systems with cumbersome stacked arrangement,the 2-D positioning systems with planar motors have received increasing attention recently.Currently,many types of planar motors have been proposed.展开更多
基于中国知网和Web of Science核心期刊文献,本研究运用CiteSpace知识图谱分析工具和文献计量法对2015—2024年间国内外认知语法研究成果进行可视化分析,探究其研究现状和热点前沿。研究发现,国内外年发文量基本保持稳定;国内外均形成...基于中国知网和Web of Science核心期刊文献,本研究运用CiteSpace知识图谱分析工具和文献计量法对2015—2024年间国内外认知语法研究成果进行可视化分析,探究其研究现状和热点前沿。研究发现,国内外年发文量基本保持稳定;国内外均形成多个主要研究机构,但国内机构分布更为协调,国外聚焦于欧美地区;国内外研究机构、研究者间的合作水平均有待提高;国内更注重汉语的语言本体研究,国外致力于探索认知语法在语言教学、文学和多模态三个领域的应用。未来研究既可以将汉语作为出发点,对比汉英倚变句异同,又可以提出汉语词类界定的新方案,还可以探索如何将识解理论进一步应用于本土研究。国外在多个领域的认知语法应用启示国内学者还可以尝试将认知语法运用于语言教学等领域,发挥理论对实践的指导作用,助推国内研究发展。展开更多
基金National key technology support program(2012BAE06B05)
文摘This article gives a brief introduction to manufacturers and markets of sputtering targets as well as the manufacturing technology thereof. Then, it analyzes the application of high-purity gold sputtering targets in the fields of integrated circuit, information storage, flat panel display, etc. Based on the above, the article analyzes the processing development trend for the high-purity gold sputtering targets in aspects of ultra-high purity, manufacturing technology, analysis and testing technologies.
文摘Lithography is one of the most important and complicated key equipment for the integr ated circuit man ufacture.The 2一D positioning device is the importan t subsystem of lithography.Compared with conventional 2一D positioning systems with cumbersome stacked arrangement,the 2-D positioning systems with planar motors have received increasing attention recently.Currently,many types of planar motors have been proposed.
文摘基于中国知网和Web of Science核心期刊文献,本研究运用CiteSpace知识图谱分析工具和文献计量法对2015—2024年间国内外认知语法研究成果进行可视化分析,探究其研究现状和热点前沿。研究发现,国内外年发文量基本保持稳定;国内外均形成多个主要研究机构,但国内机构分布更为协调,国外聚焦于欧美地区;国内外研究机构、研究者间的合作水平均有待提高;国内更注重汉语的语言本体研究,国外致力于探索认知语法在语言教学、文学和多模态三个领域的应用。未来研究既可以将汉语作为出发点,对比汉英倚变句异同,又可以提出汉语词类界定的新方案,还可以探索如何将识解理论进一步应用于本土研究。国外在多个领域的认知语法应用启示国内学者还可以尝试将认知语法运用于语言教学等领域,发挥理论对实践的指导作用,助推国内研究发展。
