Wafer bin map(WBM)inspection is a critical approach for evaluating the semiconductor manufacturing process.An excellent inspection algorithm can improve the production efficiency and yield.This paper proposes a WBM de...Wafer bin map(WBM)inspection is a critical approach for evaluating the semiconductor manufacturing process.An excellent inspection algorithm can improve the production efficiency and yield.This paper proposes a WBM defect pattern inspection strategy based on the DenseNet deep learning model,the structure and training loss function are improved according to the characteristics of the WBM.In addition,a constrained mean filtering algorithm is proposed to filter the noise grains.In model prediction,an entropy-based Monte Carlo dropout algorithm is employed to quantify the uncertainty of the model decision.The experimental results show that the recognition ability of the improved DenseNet is better than that of traditional algorithms in terms of typical WBM defect patterns.Analyzing the model uncertainty can not only effectively reduce the miss or false detection rate but also help to identify new patterns.展开更多
Aimed at the uncertain characteristics of discrete logistics network design,an interval hierarchical triangular uncertain OD demand model based on interval demand and network flow is presented.Under consideration of t...Aimed at the uncertain characteristics of discrete logistics network design,an interval hierarchical triangular uncertain OD demand model based on interval demand and network flow is presented.Under consideration of the system profit,the uncertain demand of logistics network is measured by interval variables and interval parameters,and an interval planning model of discrete logistics network is established.The risk coefficient and maximum constrained deviation are defined to realize the certain transformation of the model.By integrating interval algorithm and genetic algorithm,an interval hierarchical optimal genetic algorithm is proposed to solve the model.It is shown by a tested example that in the same scenario condition an interval solution[3275.3,3 603.7]can be obtained by the model and algorithm which is obviously better than the single precise optimal solution by stochastic or fuzzy algorithm,so it can be reflected that the model and algorithm have more stronger operability and the solution result has superiority to scenario decision.展开更多
A new intelligent anti-swing control scheme,which combined fuzzy neural network(FNN) and sliding mode control(SMC) with particle swarm optimization(PSO),was presented for bridge crane.The outputs of three fuzzy neural...A new intelligent anti-swing control scheme,which combined fuzzy neural network(FNN) and sliding mode control(SMC) with particle swarm optimization(PSO),was presented for bridge crane.The outputs of three fuzzy neural networks were used to approach the uncertainties of the positioning subsystem,lifting-rope subsystem and anti-swing subsystem.Then,the parameters of the controller were optimized with PSO to enable the system to have good dynamic performances.During the process of high-speed load hoisting and dropping,this method can not only realize the accurate position of the trolley and eliminate the sway of the load in spite of existing uncertainties,and the maximum swing angle is only ±0.1 rad,but also completely eliminate the chattering of conventional sliding mode control and improve the robustness of system.The simulation results show the correctness and validity of this method.展开更多
Reasons and realities such as being non-linear of dynamical equations,being lightweight and unstable nature of quadrotor,along with internal and external disturbances and parametric uncertainties,have caused that the ...Reasons and realities such as being non-linear of dynamical equations,being lightweight and unstable nature of quadrotor,along with internal and external disturbances and parametric uncertainties,have caused that the controller design for these quadrotors is considered the challenging issue of the day.In this work,an adaptive sliding mode controller based on neural network is proposed to control the altitude of a quadrotor.The error and error derivative of the altitude of a quadrotor are the inputs of neural network and altitude sliding surface variable is its output.Neural network estimates the sliding surface variable adaptively according to the conditions of quadrotor and sets the altitude of a quadrotor equal to the desired value.The proposed controller stability has been proven by Lyapunov theory and it is shown that all system states reach to sliding surface and are remaining in it.The superiority of the proposed control method has been proven by comparison and simulation results.展开更多
Autonomous underwater vehicles(AUV) work in a complex marine environment. Its system reliability and autonomous fault diagnosis are particularly important and can provide the basis for underwater vehicles to take corr...Autonomous underwater vehicles(AUV) work in a complex marine environment. Its system reliability and autonomous fault diagnosis are particularly important and can provide the basis for underwater vehicles to take corresponding security policy in a failure. Aiming at the characteristics of the underwater vehicle which has uncertain system and modeling difficulty, an improved Elman neural network is introduced which is applied to the underwater vehicle motion modeling. Through designing self-feedback connection with fixed gain in the unit connection as well as increasing the feedback of the output layer node, improved Elman network has faster convergence speed and generalization ability. This method for high-order nonlinear system has stronger identification ability. Firstly, the residual is calculated by comparing the output of the underwater vehicle model(estimation in the motion state) with the actual measured values. Secondly, characteristics of the residual are analyzed on the basis of fault judging criteria. Finally, actuator fault diagnosis of the autonomous underwater vehicle is carried out. The results of the simulation experiment show that the method is effective.展开更多
基金Project(Z135060009002)supported by the Ministry of Industry and Information Technology of ChinaProject(KZ202010005004)supported by Beijing Municipal Commission of Education and Beijing Municipal Natural Science Foundation of China。
文摘Wafer bin map(WBM)inspection is a critical approach for evaluating the semiconductor manufacturing process.An excellent inspection algorithm can improve the production efficiency and yield.This paper proposes a WBM defect pattern inspection strategy based on the DenseNet deep learning model,the structure and training loss function are improved according to the characteristics of the WBM.In addition,a constrained mean filtering algorithm is proposed to filter the noise grains.In model prediction,an entropy-based Monte Carlo dropout algorithm is employed to quantify the uncertainty of the model decision.The experimental results show that the recognition ability of the improved DenseNet is better than that of traditional algorithms in terms of typical WBM defect patterns.Analyzing the model uncertainty can not only effectively reduce the miss or false detection rate but also help to identify new patterns.
基金Project(51178061)supported by the National Natural Science Foundation of ChinaProject(2010FJ6016)supported by Hunan Provincial Science and Technology,China+1 种基金Project(12C0015)supported by Scientific Research Fund of Hunan Provincial Education Department,ChinaProject(13JJ3072)supported by Hunan Provincial Natural Science Foundation of China
文摘Aimed at the uncertain characteristics of discrete logistics network design,an interval hierarchical triangular uncertain OD demand model based on interval demand and network flow is presented.Under consideration of the system profit,the uncertain demand of logistics network is measured by interval variables and interval parameters,and an interval planning model of discrete logistics network is established.The risk coefficient and maximum constrained deviation are defined to realize the certain transformation of the model.By integrating interval algorithm and genetic algorithm,an interval hierarchical optimal genetic algorithm is proposed to solve the model.It is shown by a tested example that in the same scenario condition an interval solution[3275.3,3 603.7]can be obtained by the model and algorithm which is obviously better than the single precise optimal solution by stochastic or fuzzy algorithm,so it can be reflected that the model and algorithm have more stronger operability and the solution result has superiority to scenario decision.
基金Project(51075289) supported by the National Natural Science Foundation of ChinaProject(20122014) supported by the Doctor Foundation of Taiyuan University of Science and Technology,China
文摘A new intelligent anti-swing control scheme,which combined fuzzy neural network(FNN) and sliding mode control(SMC) with particle swarm optimization(PSO),was presented for bridge crane.The outputs of three fuzzy neural networks were used to approach the uncertainties of the positioning subsystem,lifting-rope subsystem and anti-swing subsystem.Then,the parameters of the controller were optimized with PSO to enable the system to have good dynamic performances.During the process of high-speed load hoisting and dropping,this method can not only realize the accurate position of the trolley and eliminate the sway of the load in spite of existing uncertainties,and the maximum swing angle is only ±0.1 rad,but also completely eliminate the chattering of conventional sliding mode control and improve the robustness of system.The simulation results show the correctness and validity of this method.
基金authorities of East Tehran Branch,Islamic Azad University,Tehran,Iran,for providing support and necessary facilities
文摘Reasons and realities such as being non-linear of dynamical equations,being lightweight and unstable nature of quadrotor,along with internal and external disturbances and parametric uncertainties,have caused that the controller design for these quadrotors is considered the challenging issue of the day.In this work,an adaptive sliding mode controller based on neural network is proposed to control the altitude of a quadrotor.The error and error derivative of the altitude of a quadrotor are the inputs of neural network and altitude sliding surface variable is its output.Neural network estimates the sliding surface variable adaptively according to the conditions of quadrotor and sets the altitude of a quadrotor equal to the desired value.The proposed controller stability has been proven by Lyapunov theory and it is shown that all system states reach to sliding surface and are remaining in it.The superiority of the proposed control method has been proven by comparison and simulation results.
基金Project(2012T50331)supported by China Postdoctoral Science FoundationProject(2008AA092301-2)supported by the High-Tech Research and Development Program of China
文摘Autonomous underwater vehicles(AUV) work in a complex marine environment. Its system reliability and autonomous fault diagnosis are particularly important and can provide the basis for underwater vehicles to take corresponding security policy in a failure. Aiming at the characteristics of the underwater vehicle which has uncertain system and modeling difficulty, an improved Elman neural network is introduced which is applied to the underwater vehicle motion modeling. Through designing self-feedback connection with fixed gain in the unit connection as well as increasing the feedback of the output layer node, improved Elman network has faster convergence speed and generalization ability. This method for high-order nonlinear system has stronger identification ability. Firstly, the residual is calculated by comparing the output of the underwater vehicle model(estimation in the motion state) with the actual measured values. Secondly, characteristics of the residual are analyzed on the basis of fault judging criteria. Finally, actuator fault diagnosis of the autonomous underwater vehicle is carried out. The results of the simulation experiment show that the method is effective.
