Lithography is one of the most important and complicated key equipment for the integr ated circuit man ufacture.The 2一D positioning device is the importan t subsystem of lithography.Compared with conventional 2一D po...Lithography is one of the most important and complicated key equipment for the integr ated circuit man ufacture.The 2一D positioning device is the importan t subsystem of lithography.Compared with conventional 2一D positioning systems with cumbersome stacked arrangement,the 2-D positioning systems with planar motors have received increasing attention recently.Currently,many types of planar motors have been proposed.展开更多
The development mechanism and mode and the new technical characteristics of the modern cutting technology are studied and analyzed. It is presented that to speed up the development of cutting technology and fully use ...The development mechanism and mode and the new technical characteristics of the modern cutting technology are studied and analyzed. It is presented that to speed up the development of cutting technology and fully use the good-quality technical resource of cutting tool have the significant meaning for construction of powerful manufacturing industry of China.展开更多
文摘Lithography is one of the most important and complicated key equipment for the integr ated circuit man ufacture.The 2一D positioning device is the importan t subsystem of lithography.Compared with conventional 2一D positioning systems with cumbersome stacked arrangement,the 2-D positioning systems with planar motors have received increasing attention recently.Currently,many types of planar motors have been proposed.
文摘The development mechanism and mode and the new technical characteristics of the modern cutting technology are studied and analyzed. It is presented that to speed up the development of cutting technology and fully use the good-quality technical resource of cutting tool have the significant meaning for construction of powerful manufacturing industry of China.
