A sputtering-type microwave multipolar ECR plasma processing for preparing thin films, is built with Nd-Fe-B magnets and 2.45 GHz, TE<sub>10</sub> mode microwave. The plasma distributions in the axial dire...A sputtering-type microwave multipolar ECR plasma processing for preparing thin films, is built with Nd-Fe-B magnets and 2.45 GHz, TE<sub>10</sub> mode microwave. The plasma distributions in the axial direction, which is important for preparing thin films, are found to be very sensitive to the magnetic potential fields in plasma chamber. The plasma parameters are also influenced by the background gas pressure.展开更多
The numerical calculation of the transmission and absorption of microwaves at an arbitrarily incident angle to the inhomogeneous spherically symmetric plasma is presented.The nonuniform sphere is modeled by a series o...The numerical calculation of the transmission and absorption of microwaves at an arbitrarily incident angle to the inhomogeneous spherically symmetric plasma is presented.The nonuniform sphere is modeled by a series of concentric spherical shells, and the electron density is constant in each shell. The overall density profile follows any given distribution function. By using the geometrical optics approximation and considering the propagation coefficient is complex, as well as the attenuation and phase coefficients are vectors, the detailed evaluation shows that the transmission and absorption of microwaves in the inhomogeneous spherically symmetric plasma depend on the electron and neutral particle collision frequency, central density, incident angle of the microwaves and density distribution profiles.展开更多
为提高土壤全硼的检测效率和数据可靠性,利用超级微波消解仪对土壤样品进行消解,通过探究样品称样量、消解酸体系及消解温度等因素对全硼测定的影响,建立了超级微波消解-电感耦合等离子体原子发射光谱(ICP-AES)法测定不同类型土壤中全...为提高土壤全硼的检测效率和数据可靠性,利用超级微波消解仪对土壤样品进行消解,通过探究样品称样量、消解酸体系及消解温度等因素对全硼测定的影响,建立了超级微波消解-电感耦合等离子体原子发射光谱(ICP-AES)法测定不同类型土壤中全硼的方法,并与传统碳酸钠熔融法进行了比较。结果表明,新建立方法的最优实验条件是在0.1 g土壤样品中加入硝酸-氢氟酸-高氯酸溶液(3 mL HNO_(3)+1.5 mL HF+1 mL HClO_(4)),放入超级微波中260℃温度下消解,使用超纯水定容至50 mL,然后采用电感耦合等离子体原子发射光谱(ICP-AES)法测定。新方法测定的全硼含量在0~1 mg/L线性关系良好,线性相关系数为0.999 9,方法检出限(LOD)为1.4 mg/kg,定量限(LOQ)为5.5 mg/kg。通过对土壤加标样品及标准物质的测定,加标回收率为97.1%~103%,相对标准偏差(RSD)为1.5%~3.0%,方法拥有良好的精密度和准确度,并且高效、准确、安全,可为不同类型土壤全硼含量的检测提供可靠的分析方法支撑。展开更多
文摘A sputtering-type microwave multipolar ECR plasma processing for preparing thin films, is built with Nd-Fe-B magnets and 2.45 GHz, TE<sub>10</sub> mode microwave. The plasma distributions in the axial direction, which is important for preparing thin films, are found to be very sensitive to the magnetic potential fields in plasma chamber. The plasma parameters are also influenced by the background gas pressure.
文摘The numerical calculation of the transmission and absorption of microwaves at an arbitrarily incident angle to the inhomogeneous spherically symmetric plasma is presented.The nonuniform sphere is modeled by a series of concentric spherical shells, and the electron density is constant in each shell. The overall density profile follows any given distribution function. By using the geometrical optics approximation and considering the propagation coefficient is complex, as well as the attenuation and phase coefficients are vectors, the detailed evaluation shows that the transmission and absorption of microwaves in the inhomogeneous spherically symmetric plasma depend on the electron and neutral particle collision frequency, central density, incident angle of the microwaves and density distribution profiles.
文摘为提高土壤全硼的检测效率和数据可靠性,利用超级微波消解仪对土壤样品进行消解,通过探究样品称样量、消解酸体系及消解温度等因素对全硼测定的影响,建立了超级微波消解-电感耦合等离子体原子发射光谱(ICP-AES)法测定不同类型土壤中全硼的方法,并与传统碳酸钠熔融法进行了比较。结果表明,新建立方法的最优实验条件是在0.1 g土壤样品中加入硝酸-氢氟酸-高氯酸溶液(3 mL HNO_(3)+1.5 mL HF+1 mL HClO_(4)),放入超级微波中260℃温度下消解,使用超纯水定容至50 mL,然后采用电感耦合等离子体原子发射光谱(ICP-AES)法测定。新方法测定的全硼含量在0~1 mg/L线性关系良好,线性相关系数为0.999 9,方法检出限(LOD)为1.4 mg/kg,定量限(LOQ)为5.5 mg/kg。通过对土壤加标样品及标准物质的测定,加标回收率为97.1%~103%,相对标准偏差(RSD)为1.5%~3.0%,方法拥有良好的精密度和准确度,并且高效、准确、安全,可为不同类型土壤全硼含量的检测提供可靠的分析方法支撑。
