在30kW级直流电弧等离子体喷射化学气相沉积(DC Arc P lasm a Jet CVD)设备上,采用Ar-H2-CH4混合气体,通过调节甲烷浓度以及控制其他沉积参数,在Mo衬底上沉积出微/纳米复合自支撑金刚石膜。实验表明,当微米金刚石膜层沉积结束后,在随后...在30kW级直流电弧等离子体喷射化学气相沉积(DC Arc P lasm a Jet CVD)设备上,采用Ar-H2-CH4混合气体,通过调节甲烷浓度以及控制其他沉积参数,在Mo衬底上沉积出微/纳米复合自支撑金刚石膜。实验表明,当微米金刚石膜层沉积结束后,在随后的沉积中,随着甲烷浓度的增加,金刚石膜表面的晶粒大小是逐渐减小的。当甲烷浓度达到20%以上时,金刚石膜生长面晶粒呈现菜花状的小晶团,膜体侧面已经没有了粗大的柱状晶,而是呈现出光滑的断口,对该层进行拉曼谱分析显示,位于1145 cm-1附近有一定强度的散射峰出现。这说明所沉积的晶粒全部变为纳米级尺寸。展开更多
It is difficult to detect and extinguish direct current(DC)arc in power electronics systems,and the arc could easily lead to a fire and cause great damage to surrounding equipment.A DC arc generation simulation unit i...It is difficult to detect and extinguish direct current(DC)arc in power electronics systems,and the arc could easily lead to a fire and cause great damage to surrounding equipment.A DC arc generation simulation unit is established,in which DC series arcs are generated by dragging the moving electrode away from the fixed one with the help of the stepper motor.In addition,a ferrite rod antenna is used to receive the electromagnetic radiation signals induced by the arcs.Based on experiments using the unit,the general characteristics of DC arc,including the pulse characteristics of arc current and source output in corresponding time window,and the frequency-domain characteristics of arc current,are studied.With discussion on three detection methods,it is concluded that the variation of current and voltage of arc,the spectrum of the arc current during the discontinuous intervals and the radiating electromagnetic signal are all features that can be adopted for detecting DC series arc.Therefore,a synthetic judgment method is suggested for further study.展开更多
文摘在30kW级直流电弧等离子体喷射化学气相沉积(DC Arc P lasm a Jet CVD)设备上,采用Ar-H2-CH4混合气体,通过调节甲烷浓度以及控制其他沉积参数,在Mo衬底上沉积出微/纳米复合自支撑金刚石膜。实验表明,当微米金刚石膜层沉积结束后,在随后的沉积中,随着甲烷浓度的增加,金刚石膜表面的晶粒大小是逐渐减小的。当甲烷浓度达到20%以上时,金刚石膜生长面晶粒呈现菜花状的小晶团,膜体侧面已经没有了粗大的柱状晶,而是呈现出光滑的断口,对该层进行拉曼谱分析显示,位于1145 cm-1附近有一定强度的散射峰出现。这说明所沉积的晶粒全部变为纳米级尺寸。
基金Project supported by International Cooperation Project in Shaanxi Province of China(2012KW-01)
文摘It is difficult to detect and extinguish direct current(DC)arc in power electronics systems,and the arc could easily lead to a fire and cause great damage to surrounding equipment.A DC arc generation simulation unit is established,in which DC series arcs are generated by dragging the moving electrode away from the fixed one with the help of the stepper motor.In addition,a ferrite rod antenna is used to receive the electromagnetic radiation signals induced by the arcs.Based on experiments using the unit,the general characteristics of DC arc,including the pulse characteristics of arc current and source output in corresponding time window,and the frequency-domain characteristics of arc current,are studied.With discussion on three detection methods,it is concluded that the variation of current and voltage of arc,the spectrum of the arc current during the discontinuous intervals and the radiating electromagnetic signal are all features that can be adopted for detecting DC series arc.Therefore,a synthetic judgment method is suggested for further study.
