The optical emission spectroscopy of a surface dielectric barrier discharge plasma aerodynamic actuator is investigated with different electrode configurations, applied voltages and driving frequencies. The rotational...The optical emission spectroscopy of a surface dielectric barrier discharge plasma aerodynamic actuator is investigated with different electrode configurations, applied voltages and driving frequencies. The rotational temperature of N2 （C^3 Ⅱu） molecule is calculated according to its rotational emission band near 380.5 nm. The average electron energy of the discharge is evaluated by emission intensity ratio of first negative system to second positive system of N2. The rotational temperature is sensitive to the inner space of an electrode pair. The average electron energy shows insensitivity to the applied voltage, the driving frequency and the electrode configuration.展开更多
A Maxwellian electron energy distribution function （EEDF） is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases,...A Maxwellian electron energy distribution function （EEDF） is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases, non-Maxwellian EEDFs can be formed due to the non-local electron heating or the inelastic-collisional energy loss processes. In this work, with a collisional-radiative model, we propose an approach to obtain the non-Maxwellian EEDF with a ＇two-temperature structure＇ from the emission line-ratios of Paschen 2p levels of argon and kryp- ton atoms. For applications of this approach in reactive gas （CF4, O2, etc） discharges that contain argon and krypton, recommendations of some specific emission line-ratios are provided, according to their sensitivities to the EEDF variation. The kinetic processes of the relevant excited atoms are also discussed in detail.展开更多
A sheet plasma is generated by a mesh anode and a single hot-filament cathode with a DC power supply, and its characteristics are experimentally investigated. The sheet plasma is observed to locate around the anode. B...A sheet plasma is generated by a mesh anode and a single hot-filament cathode with a DC power supply, and its characteristics are experimentally investigated. The sheet plasma is observed to locate around the anode. Both electron density and electron temperature derived from the average energy of the energetic electrons in nitrogen are estimated to be 10s cm^-3 and 20- 40 eV, respectively, using the optical emission spectroscopy （OES） method based on a kinetic model of low-pressure nitrogen discharge. The electron density, electron temperature and their spatial distributions are found to be affected by the supplying voltage on the anode（70 V to 300 V）, filament temperature （600℃ to 780℃） and gas pressure （2 Pa to 20 Pa）. By adjusting these parameters the discharge status can be easily controlled.展开更多
By using a Langmuir probe, the electron energy distribution function (EEDF) is measured in inductively coupled plasma discharges in N2/Ar mixtures at 200W rf powers. In pure N2 discharges a Maxwellian EEDF is observed...By using a Langmuir probe, the electron energy distribution function (EEDF) is measured in inductively coupled plasma discharges in N2/Ar mixtures at 200W rf powers. In pure N2 discharges a Maxwellian EEDF is observed.When the mixing ratio of Ar increases, the distribution of high-energy electrons evolves with a different trend from that of low-energy electrons, resulting in an apparent “two temperature structure” of the EEDF. We discuss this non-Maxwellian EEDF and its effect on the measurement and the interpretation of “electron temperature”by both the probe and line ratio technique.展开更多
An atmospheric pressure plasma jet （APPJ） using radio-frequency （13.56 MHz） power has been developed to produce homogeneous glow discharge at low temperature. With optical emission spectroscopy, we observed the ex...An atmospheric pressure plasma jet （APPJ） using radio-frequency （13.56 MHz） power has been developed to produce homogeneous glow discharge at low temperature. With optical emission spectroscopy, we observed the excited species （atomic helium, atomic oxygen and metastable oxygen） generated in this APPJ and their dependence on gas composition ratio and RF power. O and O2（b1∑g^＋） are found in the effluent outside the jet by measuring the emission spectra of effluent perpendicular to the jet. An interesting phenomenon is found that there is an abnormal increase of O emission intensity （777.4 nm） between 10 mm and 40 mm away from the nozzle. This observation result is very helpful in practical operation.展开更多
文摘The optical emission spectroscopy of a surface dielectric barrier discharge plasma aerodynamic actuator is investigated with different electrode configurations, applied voltages and driving frequencies. The rotational temperature of N2 （C^3 Ⅱu） molecule is calculated according to its rotational emission band near 380.5 nm. The average electron energy of the discharge is evaluated by emission intensity ratio of first negative system to second positive system of N2. The rotational temperature is sensitive to the inner space of an electrode pair. The average electron energy shows insensitivity to the applied voltage, the driving frequency and the electrode configuration.
基金supported by National Natural Science Foundation of China （Nos. 11075093 and 10935006） and the China Postdoctoral Science Foundation （No. 20100480327）
文摘A Maxwellian electron energy distribution function （EEDF） is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases, non-Maxwellian EEDFs can be formed due to the non-local electron heating or the inelastic-collisional energy loss processes. In this work, with a collisional-radiative model, we propose an approach to obtain the non-Maxwellian EEDF with a ＇two-temperature structure＇ from the emission line-ratios of Paschen 2p levels of argon and kryp- ton atoms. For applications of this approach in reactive gas （CF4, O2, etc） discharges that contain argon and krypton, recommendations of some specific emission line-ratios are provided, according to their sensitivities to the EEDF variation. The kinetic processes of the relevant excited atoms are also discussed in detail.
基金supported by National Defence Research Foundation of China (No.A1420060181)
文摘A sheet plasma is generated by a mesh anode and a single hot-filament cathode with a DC power supply, and its characteristics are experimentally investigated. The sheet plasma is observed to locate around the anode. Both electron density and electron temperature derived from the average energy of the energetic electrons in nitrogen are estimated to be 10s cm^-3 and 20- 40 eV, respectively, using the optical emission spectroscopy （OES） method based on a kinetic model of low-pressure nitrogen discharge. The electron density, electron temperature and their spatial distributions are found to be affected by the supplying voltage on the anode（70 V to 300 V）, filament temperature （600℃ to 780℃） and gas pressure （2 Pa to 20 Pa）. By adjusting these parameters the discharge status can be easily controlled.
文摘By using a Langmuir probe, the electron energy distribution function (EEDF) is measured in inductively coupled plasma discharges in N2/Ar mixtures at 200W rf powers. In pure N2 discharges a Maxwellian EEDF is observed.When the mixing ratio of Ar increases, the distribution of high-energy electrons evolves with a different trend from that of low-energy electrons, resulting in an apparent “two temperature structure” of the EEDF. We discuss this non-Maxwellian EEDF and its effect on the measurement and the interpretation of “electron temperature”by both the probe and line ratio technique.
基金The project partially supported by National Natural Science Foundation of China (No. 10335040)
文摘An atmospheric pressure plasma jet （APPJ） using radio-frequency （13.56 MHz） power has been developed to produce homogeneous glow discharge at low temperature. With optical emission spectroscopy, we observed the excited species （atomic helium, atomic oxygen and metastable oxygen） generated in this APPJ and their dependence on gas composition ratio and RF power. O and O2（b1∑g^＋） are found in the effluent outside the jet by measuring the emission spectra of effluent perpendicular to the jet. An interesting phenomenon is found that there is an abnormal increase of O emission intensity （777.4 nm） between 10 mm and 40 mm away from the nozzle. This observation result is very helpful in practical operation.
