摘要
采用放电等离子烧结技术制备了Bi2 O3/Cu复合梯度靶材 ,利用扫描电子显微镜和能谱分析仪对材料的微观组织形貌及成分进行了分析。结果表明 ,合成的复合梯度靶材具有宏观组织不均匀性和微观组织连续性的特征 ,显微组织中不存在微裂纹 ,减小了热应力的影响。与单一成分靶材相比 ,复合梯度靶材的热导率显著提高 ,解决了靶材在溅射过程中因散热不良而碎裂的问题 。
Composite graded Bi 2O 3/Cu target materials were produced by spark plasma sintering technique. Microstructure and constituents were investigated by means of scanning electron microscope with energy dispersive X ray detector. It is found that the target materials exhibit the micro structural characteristics of macroscopic inhomogeneity and microscopic continuity. Obvious atom diffusion between different composition layers can hardly be detected. There are no fine cracks in the interface, and the bonding states between conjoint layers are ideal. Compared with single composition target, the composite graded target possesses much better thermal conductance as well as the usage factor.
出处
《稀有金属》
EI
CAS
CSCD
北大核心
2004年第1期214-216,共3页
Chinese Journal of Rare Metals
