摘要
针对压电陶瓷输出位移过小的缺点,采用AE0505D16型层叠式PZT器件作为驱动器,柔性铰链作为导向机构,设计了一种超精密压电式微位移机构.该机构输出位移由原来的11 6μm增加到100μm,能够满足许多长行程、超精定位运动的需要.对此微位移机构进行定位准确度测试,将它作为位移补偿装置安装于精密滚珠丝杠副驱动的机床上,机床定位误差由原来的1μm降低到0 01μm,定位准确度得到显著提高.
A kind of ultra precision micro-displacement mechanism driven by PZT actuator is designed with AE0505D16 PZT as the micro-displacement driver and a kind of flexible joint as the guiding device to avoid the too small output displacement. The output displacement of this mechanism is amplified from 11.6 μm to 100 μm and can cater for many long distance and ultra-precise positioning motions. As a displacement compensation device, it has a positioning accuracy promoted from 1 μm to 0.01 μm.
出处
《哈尔滨工业大学学报》
EI
CAS
CSCD
北大核心
2004年第4期487-489,共3页
Journal of Harbin Institute of Technology
