摘要
使用原子力显微镜对由微波等离子体电子回旋共振化学气相沉积技术制备的超薄类金刚石薄膜的纳米摩擦性能进行了研究。结果表明:氢化非晶碳膜(a C∶H)的摩擦力和外加载荷基本成线性关系,可以使用修正的Amonton公式进行表征;厚度在64.9nm以下薄膜的微观承载性能和膜厚存在明显的正比例关系。通过分析磨损深度和循环次数之间的关系以及对磨损区域的导电性研究,表明a C∶H膜表层的微观承载性能较其内层相差很大,表面存在着一层软膜。
Nano-tribology of untrathin diamond-like carbon (DLC) coatings deposited by microwave plasma electron cyclotron resonance chemical vapor deposition (MP ECR-CVD) was analyzed by nanoscale friction, scratch and wear tests using atomic force microscopy (AFM). Friction force is proportional to applied load, which can be described by revised Amonton formula. The microscale scratch and wear tests also indicate that, with the thickness below 64.9nm, the thicker coatings generally exhibit better load-carrying capacity than the thinner coatings which can be called a thickness effect. In addition, according to relationship of wear depth, wear circle and conductivity of the wear region, nanoscale soft layers can be revealed which exhibit lower load-carrying capacity than the inner stable bulk structure.
出处
《机械工程材料》
CAS
CSCD
北大核心
2004年第2期47-50,共4页
Materials For Mechanical Engineering
