摘要
波导法测量光学薄膜的折射率和厚度是一种很有用的技术。本文不仅介绍了波导法的测量原理和装置,而且给出了CeF_3、NdF_3、8329玻璃和Al_2O_3膜的测量结果以及潮汽吸附对折射率的影响,最后分析了测试精度。
Guided wave method for measuring refractive index and thicknessof optical thin films is a useful technique. In this paper, not only the princi-ple and equipment of the guided wave technique but also measured results ofCeF_3, NdF_3, 8329 glass, and Al_2,O_3, films and effect of absorbing moisture onreftactive index are presented. Finally, the measured precision is analysed.
出处
《仪器仪表学报》
EI
CAS
1986年第1期54-59,共6页
Chinese Journal of Scientific Instrument
