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降低超大规模集成电路用高纯水中总有机碳的能量传递光化学模型 被引量:6

An Energy Transfer Photochemical Model for the Abatement of Total Organic Carbon in High Purity Water Used in ULSI Fabrication
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摘要 本文提出用 185nm紫外线降低高纯水中总有机碳 (TOC)的能量传递光化学模型 .计算了水的流量、TOC的浓度、照射腔的尺寸与所需紫外光能量的关系 ,从而解决了在工程设计中 185nm紫外灯的选择和计算方法 .根据理论计算出的结果和实验十分一致 ,证实了本模型的正确性 .使高纯水中的TOC由 4 2 0 0 μg/l降至 0 .3μg/l,是目前国内外高纯水中TOC浓度的最好水平 . An energy transfer photochemical model for the abatement of total organic carbon(TOC)in high purity water using 185nm Ultraviolet(UV)irradiations is proposed.The dependence of 185nm UV irradiation energy on the water flow rates,TOC concentrations and size of irradiation cell has been established.The models of selection of 185nm UV source and calculation in engineering design have been solved.The theoretical calculation agrees with experiments,which proves the model to be correct.The TOC concentrations in high purity water were decreased from 4200μg/L to 0.3μg/L,which is the lowest concentration of TOC.
出处 《电子学报》 EI CAS CSCD 北大核心 2003年第11期1601-1604,共4页 Acta Electronica Sinica
关键词 超大规模集成电路 总有机碳 185纳米紫外 光化学 ULSI total organic carbon 185nm UV photochemistry
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