摘要
介绍了基于PZT的一维微动工作台,采用平行板机构,对其进行了有限元分析设计。使用精密光栅进行位移闭环检测,采用模糊PI控制算法对系统进行控制,既具有模糊控制灵活而且适应性强的优点,又具有PI控制精度高的特点。实验证明了该方法的有效性。
In this paper, a one-dimension micro table is described. The table has a parallel board framework, and which has been analyzed by finite element method. Position close loop examination is performed by an exact grating. Fuzzy PI arithmetic is used in the controlling of the system. It has not only the advantages of agility and adaptivity of fuzzy control, but the characteristics of high accuracy of PI arithmetic. Efficiency of the method has been validated through the experiments.
出处
《压电与声光》
CSCD
北大核心
2003年第5期436-438,共3页
Piezoelectrics & Acoustooptics
基金
国家"八六三"基金(2001AAAA423110)
关键词
平行板
PZT驱动
模糊控制
parallel board
PZT actuator
fuzzy control
