摘要
本文建立了用于计算立式钟罩CVD反应器内对流扩散现象的流体动力学和热输运方程,并用Galerkin有限元法做了计算(计算过程中考虑了热浮力对流动的影响)。计算结果表明,在热基座上方存在着涡旋运动,彻底消除这种运动比较困难,但适当地增加入流速度可使涡旋区远离基座表面,从而可消弱涡旋运动对薄膜生长均匀性的影响。
The equation of fluid dynamics and heat transfer is developed to calculate complex convection and diffusion phenomena in a vertical bell jar CVD reactor. The flow and heat transfer problem defined by the equation for stream, vortex and temperature is solved numerically by Galerkin finite elements method. In this paper, the bouyancedriven convection is considered. The results show that recirculation cell exists above the hot suspector in the reactor, and can be hardly eliminated. However, the recirculation cell can be removed from the surface of susceptor by properly increasing inlet velocity, and effects on the uniform of film thickness can be weakened.
出处
《吉林大学自然科学学报》
CAS
CSCD
1992年第1期29-33,共5页
Acta Scientiarum Naturalium Universitatis Jilinensis
关键词
质量输运
有限元法
反应器
CVD
mass transfer
chemical vapor deposition(CVD)
finite elements method
