摘要
研究多晶硅工业的主要副产品四氯化硅(SiCl_4)在离子液体中的溶解、电沉积过程。结果表明,SiCl_4在离子液体中的溶解度随温度升高而降低,离子液体的导电率随温度升高而增加。在阴离子为[TNf_2]的情况下,阳离子为[N_(1114)]的季铵盐类离子液体比咪唑类[Bmim]离子液体具有更好的SiCl_4溶解度和导电性。SiCl_4在季铵盐类离子液体的溶解度随烷基主链长度增加而增大,随侧链长度增加而降低。[N_(1114)][TNf_2]和SiCl_4之间形成C-Cl、Si-O和C-Si键,在[N_(1114)][TNf_2]-SiCl_4体系中S_i^(4+)的还原电位为-2.2V。在温度25℃、SiCl_4浓度0.3mol/L、电流密度20A/m^2、电解时间2h的条件下可电沉积得到较为致密的硅薄膜,呈球形颗粒状分布。
Dissolution and electrodeposition process of silicon tetrachloride(SiCl4)in ionic liquids were investigated.The results show that solubility of SiCl4in ionic liquid drops with increase of temperature,and conductivity of ionic liquid rises with increase of temperature.When anion is[TNf2],quaternary ammonium ionic liquid with cation of[N1114]has better solubility of SiCl4and conductivity than that of imidazole[Bmim]ionic liquid.Solubility of SiCl4in quaternary ammonium ionic liquid rises with increase of alkyl backbone length,and drops with increase of side chain length.C-Cl,Si-O and C-Si bonds are formed between[N1114][TNf2]and SiCl4.Reduction potential of Si 4+in[N1114][TNf2]-SiCl4system is-2.2V.Dense silicon film with spherical particle distribution can be obtained by electrowinning at temperature of 25℃,concentration of SiCl4of 0.3mol/L,current density of 20A/m2,and electrolysis time of 2h.
作者
李晓
张承龙
巫亮
马恩
王瑞雪
苑文仪
白建峰
王景伟
LI Xiao;ZHANG Cheng-long;WU Liang;MA En;WANG Rui-xue;YUAN Wen-yi;BAI Jian-feng;WANG Jing-wei(Research Centre of Resource Recylcling Science and Engineering,Shanghai Polytechnic University,Shanghai 201209,China;Shanghai Collaborative Innovation Centre for WEEE Recycling,Shanghai 201209,China;Department of Physics,Shanghai University,Shanghai 200444,China)
出处
《有色金属（冶炼部分）》
CAS
北大核心
2019年第4期68-72,共5页
Nonferrous Metals（Extractive Metallurgy)
基金
国家自然科学基金资助项目(51474146)
上海第二工业大学校重点学科(XXKZD1602)
上海第二工业大学研究生项目基金(EGD17YJ0002)
关键词
四氯化硅
离子液体
溶解
电沉积
silicon tetrachloride
ionic liquid
dissolution
electrodeposition
作者简介
李晓(1994-),男,河南南阳人,硕士研究生;通信作者:张承龙(1975-),男,江苏昆山人,博士,教授.
