摘要
以聚苯乙烯(PS)微球为内核,通过控制正硅酸乙酯的水解过程制备具有不同壳层形态的核/壳结构PS/SiO2复合磨料,应用于二氧化硅介质层的化学机械抛光,借助AFM测量抛光表面的形貌、轮廓曲线及粗糙度.SEM和TEM结果显示:碱性水解条件下,复合磨料的壳层由SiO2纳米颗粒组成(非连续壳层);酸性条件下,复合磨料的壳层则呈无定型网状(连续壳层).抛光对比试验结果表明:复合磨料的PS弹性内核有利于降低表面粗糙度并减少机械损伤,SiO2壳层则有利于提高材料去除率,复合磨料的核/壳协同效应对于提高抛光质量具有主要影响.相对于非连续壳层复合磨料,具有连续壳层的PS/SiO2复合磨料能够得到更低的抛光表面粗糙度值(RMS=0.136 nm),且在抛光过程中表现出了更好的结构稳定性.然而,PS/SiO2复合磨料的壳层形态对抛光速率的影响则不明显.
The PS/SiO2 composite abrasives with different shell morphologies were prepared using polystyrene(PS) as a core and silica as a shell.The shell morphologies were controlled by adjusting the hydrolysis condition of tetraethylorthosilicate.The obtained samples were analyzed by scanning electron microscopy,transmission electron microscopy and fourier transform infrared spectrum.The chemical mechanical polishing performances of the PS/SiO2 composite abrasives on silicon dioxide layer were investigated by atomic force microscopy.Results indicate that the shell of the composites was composed of SiO2nanoparticles(discontinuous shell) under alkaline hydrolysis condition and amorphous form(continuous shell) under acidic condition,respectively.Compared with the single and the mixed abrasives,the improved polishing behavior was resulted from the synergistic effect of the PS core and the silica shell.The elastic PS core was benefit to reduce surface roughness and mechanical damage.Meanwhile,the coated silica shell was useful to increase material removal rate.The PS/SiO2 composite abrasives with continuous shell displayed a better structure stability and a lower root-mean-square roughness value(RMS = 0.136 nm) than those of the abrasives with discontinuous shell.However,there was an unobvious effect of shell morphologies on material removal rate.
出处
《摩擦学学报》
EI
CAS
CSCD
北大核心
2014年第5期578-585,共8页
Tribology
基金
国家自然科学基金项目(No.51205032)
江苏省自然科学基金项目(BK2012158)资助~~
关键词
复合磨料
核壳结构
化学机械抛光
壳层形态
composite abrasive,core-shell structure,chemical mechanical polishing,shell morphology
