摘要
本文对透镜后偏转和透镜中偏转的两种静电聚焦一偏转复合系统的三级几何象差和一级色差进行了数值计算。计算结果表明,在匹配弯曲轴的情况下,这种复合系统有可能获得较小的偏转象差,同时本文也给出了判断复合系统中聚焦场与偏转场真正匹配的某些判据。
In this paper the third order geometric and first order chromatic aberrations for two types of combined electrostatic focusing-deflection systems, i. e. post-lens deflection system and in-lens deflection system, have numerically been calculated. The computational results show that in the case of matched curvilinear optical axes, it is possible to achieve smaller deflection aberrations in such combined systems. In the meantime, certain criteria for truly matching between focusing and deflection fields in combined systems have also been given.
出处
《电子学报》
EI
CAS
CSCD
北大核心
1992年第6期36-42,共7页
Acta Electronica Sinica
基金
国家自然科学基金
关键词
偏转
复合系统
色差
弯曲轴
微电子
Combined electrostatic focusing-deflection system, Geometric aberration, Chromatic aberration, Curvilinear optical axis
