摘要
二苯乙烯基苯酚聚氧乙烯醚(DSP聚醚)是一种光刻胶显影液用的特种表面活性剂,其在合成过程中常会引入过渡金属离子杂质。为了吸附DSP聚醚中的过渡金属离子杂质,采用水热合成法制备了不同镁铝比的硅酸镁铝吸附材料,借助SEM、TEM、BET、XPS等测试手段对其进行表征,并进行吸附实验考察该材料在不同镁铝比及不同吸附条件下对过渡金属离子的吸附性能。结果表明:当投料镁铝比为5∶1时,硅酸镁铝展现出最佳的吸附性能。在该镁铝比条件下,30 mg硅酸镁铝加入15 mg/L的Fe(Ⅲ)溶液中,30 min内Fe(Ⅲ)的去除率可达95.6%;在pH值为2~6的酸性环境中,该材料仍能保持优异的吸附效率,且具备良好的循环使用性能;硅酸镁铝(n(Mg)/n(Al)=5∶1)在DSP聚醚水溶液中对Fe(Ⅲ)、Cu(Ⅱ)、Zn(Ⅱ)同样展现出优异的去除能力,对过渡金属离子的去除率仍可保持在95%。进一步研究发现,该硅酸镁铝材料可以通过静电吸引、物理吸附和化学吸附3种机制去除过渡金属离子。该硅酸镁铝材料的制备方法简单且吸附效率高,为去除DSP聚醚中过渡金属离子杂质提供了解决思路。
Diphenyl styryl phenol polyoxyethylene ether(DSP polyether),a specialized surfactant employed in photoresist developers,inherently introduces transition metal ion impurities during synthesis.To address this issue,magnesium-aluminum silicate-adsorbents with different magnesium-aluminum ratios were synthesized via hydrothermal methods and characterized using SEM,TEM,BET,and XPS.Their adsorption performance was systematically evaluated under varying synthesis parameters and operational conditions.Results demonstrated the optimal performance at a magnesium-aluminum feed ratio of 5∶1,where 30 mg of the adsorbent achieved 95.6%Fe(Ⅲ)removal from a 15 mg/L solution within 30 minutes.In acidic environments(pH 2-6),the material maintained excellent adsorption efficiency and recyclability.Magnesium-aluminum silicate(n(Mg)/n(Al)=5∶1)exhibited outstanding removal capability for Fe(Ⅲ),Cu(II)and Zn(II),achieving a 95%removal rate for transition metal ions in the DSP polyether system.Further studies found that the magnesium-aluminum silicate material could remove transition metal ions through three mechanisms:electrostatic attraction,physical adsorption and chemical adsorption.This synthesis strategy,combined with robust adsorption efficacy,offers a practical approach for eliminating transition metal contaminants in DSP polyether systems.
作者
王建宁
顾艳
王刚强
金一丰
吕汪洋
李楠
WANG Jianning;GU Yan;WANG Gangqiang;JIN Yifeng;LÜWangyang;LI Nan(National Engineering Lab for Textile Fiber Materials and Processing Technology,Zhejiang Sci-Tech University,Hangzhou 310018,China;Keyi College of Zhejiang Sci-Tech University,Shaoxing 312369,China;Zhejiang Huangma Technology Co.,Ltd.,Shaoxing 312363,China)
出处
《浙江理工大学学报(自然科学版)》
2025年第5期634-645,共12页
Journal of Zhejiang Sci-Tech University(Natural Sciences)
基金
浙江省“尖兵”“领雁”研发攻关计划(2023C01073)。
关键词
DSP聚醚
过渡金属离子
半导体清洗
硅酸镁铝
吸附
DSP polyether
transition metal ions
semiconductor cleaning
aluminium-magnesium silicates
adsorption
作者简介
王建宁(2000-),女,山东淄博人,硕士研究生,主要从事硅酸镁铝吸附过渡金属离子方面的研究;通信作者:李楠,E-mail:linan@zstu.edu.cn。
