摘要
设计了一种基于斩波技术的电容式MEMS加速度计开环检测电路,该电路可将加速度计感知的加速度信号转换为可被后续电路处理的电信号。电路采用全差分结构设计,提高了系统的共模干扰抑制能力,同时通过斩波技术应用有效抑制了电路噪声。该开环检测电路与电容式MEMS加速度计敏感机械结构协同工作,在0.18μm BCD工艺下进行仿真,实现了±6 g的加速度检测量程,灵敏度为0.54 V/g,带宽为1.35 kHz。在1 kHz~1.35 kHz频率范围内,电路的输出噪声为10.59μV,等效输出分辨率为19.61μg,输出动态范围为109.71 dB,电路的总功耗为2.94 mW。
In this paper,an open-loop detection circuit for a capacitive MEMS accelerometer based on chopping technology is designed.The circuit is intended to convert the acceleration signal sensed by the accelerometer into an electrical signal that can be processed by subsequent circuits.Utilizing a fully differential architecture,the circuit enhances common-mode interference rejection capability,while effectively suppressing circuit noise through the application of the chopping technology.This open-loop detection circuit works in coordination with the sensitive mechanical structure of the capacitive MEMS accelerometer.Through simulation under the 0.18μm BCD process,an acceleration detection range of±6 g is achieved,with a sensitivity reaching 0.54 V/g and a bandwidth of 1.35 kHz.In the frequency range of 1 kHz~1.35 kHz,the circuit output noise is 10.59μV,the equivalent output resolution is 19.61μg,the output dynamic range is 109.71 dB,and the total power consumption of the circuit is 2.94 mW.
作者
吕冰
李兆涵
卢宏斌
汪家奇
常玉春
LYU Bing;LI Zhaohan;LU Hongbin;WANG Jiaqi;CHANG Yuchun(School of Integrated Circuit,Dalian University of Technology,Dalian 116024;Beijing Institute of Aerospace Control Devices,Beijing 100039)
出处
《导航与控制》
2025年第3期185-192,共8页
Navigation and Control
关键词
加速度计
斩波技术
开环检测
低噪声
accelerometer
chopping technology
open-loop detection
low noise
作者简介
吕冰,女,硕士,集成电路工程专业,研究方向为MEMS加速度计读出电路;通信作者:常玉春,男,博士,微电子学与固体电子学专业,教授,研究方向为模拟/数模混合集成电路设计、专用集成电路设计。
