摘要
采用反应磁控共溅射技术,通过调节转速(0、5、10、20 r/min)制备了具有不同化学计量比的TiCrN涂层材料。研究了氮化学计量比对TiCrN涂层的相组成、微观形貌、结合力以及导电性能的影响。结果表明:TiCrN涂层的氮化学计量比均小于1,并且随着转速的增加而增加;制备的晶体TiCrN涂层颗粒均为纳米级,并且粒径随着氮的化学计量比的增加而变大;TiCrN涂层的结合力与氮的化学计量比变化趋势一致,都随着转速的升高而增加;TiCrN涂层的电阻率的变化为几何缺陷和电子缺陷相互作用的结果,当转速为0 r/min时,薄膜呈现非晶态,电阻率最高,当转速增加到5 r/min时,几何缺陷使TiCrN涂层的电阻率仍然很高;当转速为10和20 r/min时,随着氮原子的填补,晶体变形减弱,几何缺陷下降,TiCrN涂层的电阻率均明显下降,电子缺陷使得转速为20 r/min的TiCrN涂层的电阻率比转速为10 r/min的高。
Non-stoichiometric TiCrN coatings were prepared by adjusting the rotational speed(0 r/min,5 r/min,10 r/min,20 r/min)using the reactive magnetron co-sputtering technology.The influence of the nitrogen stoichiometric ratio on the phase composition,microstructure,bonding force and the electrical conductivity of TiCrN coatings were investigated.The results show that the nitrogen stoichiometric ratio of TiCrN coatings is less than 1,and it increases with the increase of rotational speed.The particles of the crystalline TiCrN coatings are nano-sized,and the size become coarser with the increase of the nitrogen stoichiometric ratio.The bonding force of TiCrN coating is consistent with the nitrogen stoichiometric ratio,and both of them increase with the rotational speed increasing.The variation of the resistivity of TiCrN coatings is the combined results of the geometric and electronic defects.The resistivity is highest due to the amorphous structure when the rotation speed is 0 r/min.When the rotational speed increases to 5 r/min,the geometrical defect makes the resistivity of TiCrN coating still high.When the rotation speed are 10 r/min and 20 r/min,after filling of more nitrogen atoms,the deformation of TiCrN crystal weakens and the geometric defects decrease,resulting in an obvious decrease of the resistivity.The electronic defects cause the resistivity of TiCrN coating at 20 r/min to be higher than that of the coating at 10 r/min.
作者
李琳
楼美琪
赵小花
杜军旗
孙峰
LI Lin;LOU Meiqi;ZHAO Xiaohua;DU Junqi;SUN Feng(AECC Aviation Power Co.,Ltd.,Xi'an 710018,China;Western Superconducting Technologies Co.,Ltd.,Xi'an 710018,China;School of Materials Science and Engineering,Northwestern Polytechnical University,Xi'an 710072,China)
出处
《热加工工艺》
北大核心
2025年第17期201-205,共5页
Hot Working Technology
基金
陕西省重点研发计划项目(2019CGHJ-21)。
关键词
TiCrN
磁控溅射
氮化学计量比
电阻率
TiCrN
magnetron sputtering
nitrogen stoichiometric ratio
electrical resistivity
作者简介
李琳,男,工程师,主要研究方向:铸造高温合金,E-mail:416790775@qq.com;通讯作者:楼美琪,女,工程师,硕士,主要从事钛合金材料研发及项目管理,E-mail:1134323895@qq.com。
