摘要
基于高温超导约瑟夫森结的超导量子干涉器件(SQUID),工作在液氮温区、运行成本低,可应用于生物磁测、地球物理勘测、材料无损评估、磁性粒子探测等方面的微弱磁场测量。所述SQUID是在钛酸锶(SrTiO_(3))双晶衬底上生长钇钡铜氧(YBCO)/金(Au)双层膜,通过紫外光刻、离子束刻蚀等技术制备的。在液氮温区测量了超导量子干涉器件的电压-电流(V-I)特性曲线,磁通电压特性曲线(Φ-V)和频率-磁通噪声曲线。器件的磁通电压转换系数为83.1μV/Φ_(0)(Φ_(0)为磁通量子),器件的有效面积达到0.45 mm^(2),在10 kHz频率处,磁通噪声和磁场噪声分别为37.0×10^(-6)Φ_(0)·Hz^(-1/2)和168.9 fT·Hz^(-1/2)。
The superconducting quantum interference devices based on high-temperature superconducting Josephson junctions works in the liquid nitrogen temperature range and has low operating costs.It can be used for weak magnetic field measurements in biomagnetism measurement,geophysical survey,nondestructive material evaluation,magnetic particle detection,etc.The mentioned SQUID is prepared by growing yttrium barium copper oxide(YBCO)/gold(Au)doublelayer film on a strontium titanate(SrTiO_(3))bicrystal substrate through ultraviolet lithography,ion beam etching and other techniques.The voltage-current(V-I)characteristic curve,flux-voltage characteristic curve(Φ-V),and frequency-flux noise curve of superconducting quantum interference devices are measured in the liquid nitrogen temperature range.The magnetic flux voltage conversion coefficient of the device is 83.1μV/Φ_(0)(Φ_(0)is the quantum of magnetic flux),the effective area of the device reaches 0.45 mm^(2).At a frequency of 10 kHz frequency,the flux noise and magnetic field noise are 37.0×10^(-6)Ф0·Hz^(-1/2)and 168.9 fT·Hz^(-1/2),respectively.
作者
钟青
孙永
徐达
陈建
陈晴
李劲劲
王雪深
ZHONG Qing;SUN Yong;XU Da;CHEN Jian;CHEN Qing;LI Jinjin;WANG Xueshen(National Institute of Metrology,Beijing 100029,China;Shenyang University of Chemical Technology,Shenyang,Liaoning 110142,China)
出处
《计量学报》
北大核心
2025年第8期1091-1096,共6页
Acta Metrologica Sinica
基金
中国计量科学研究院基本科研业务费重点领域项目(AKYZD2211-1)。
作者简介
第一作者:钟青(1964-),北京人,中国计量科学研究院研究员,主要从事计量用量子芯片研究。Email:zhongq@nim.ac.cn;通讯作者:王雪深(1984-),男,北京人,中国计量科学研究院副研究员,从事低温超导器件研究。Email:wangxs@nim.ac.cn。
